Load port module

ABSTRACT

A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of and claims the benefit ofnon-provisional patent application Ser. No. 11/178,836 filed on Jul. 11,2005 the disclosure of which is incorporated herein by reference in itsentirety.

BACKGROUND

1. Field of the Invention

The present invention relates to substrate processing apparatus and,more particularly, to an improved load port module for the substrateprocessing apparatus.

2. Brief Description of Related Developments

Continuous demand by consumers for ever cheaper electronic devices hasmaintained pressure on manufacturers of the device to improveefficiency. Indeed, in the current market place, many of the devices,and to a much greater extent the electronic and semiconductor componentsused in the devices, have become commodities. The desire ofmanufacturers of electronic and semiconductor device to increaseefficiency manifests itself at all levels, but is of specialsignificance in the design, construction, and operation of fabricationfacilities or fabs, and the substrate processing apparatus used withinthe fabs.

SUMMARY OF THE EXEMPLARY EMBODIMENTS

In accordance with one exemplary embodiment of the present invention, asubstrate loading device is provided. The substrate loading devicecomprises a frame, a cassette support, and a user interface. The frameis adapted for connecting the device to a substrate processingapparatus. The frame has a transport opening through which substratesare transported between the device and processing apparatus. Thecassette support is connected to the frame for holding at least onesubstrate holding cassette. The user interface is arranged for inputtinginformation. The user interface is mounted to the frame so that the userinterface is integral with the frame.

In accordance with another exemplary embodiment of the presentinvention, a substrate loading device is provided. The substrate loadingdevice comprises a frame, a cassette support and a display. The frame isadapted for connecting the device to a substrate processing apparatus.The frame has a transport opening through which substrates aretransported between the device and processing apparatus. The cassette isconnected to the frame for holding at least one substrate holdingcassette. The display is arranged for displaying information related toa predetermined characteristic of the device. The display is capable ofoperating as a graphic user interface. The display is capable of beingintegrated with the frame to form an assembly capable of being made andthen removed as a unit from the processing apparatus.

In accordance with another exemplary embodiment of the presentinvention, a substrate loading device is provided. The substrate loadingdevice comprises a frame, and a substrate transport container support.The frame is adapted for connecting the device to a substrate processingapparatus. The frame has a transport opening through which substratesare transported between the device and processing apparatus. Thesubstrate transport container support is connected to the frame forholding at least one substrate transport container. The transportcontainer support comprises a cover, at least one detector, and amember. The cover covers at least a portion of the support on which theat least one substrate transport container is seated. The cover has aresiliently flexible section. The at least one detector is connected tothe cover for detecting a presence of the least one transport containeron the support. The member is connected to the flexible section of thecover to move as a unit with the flexible section. The member cooperateswith the detector causing the detector to detect the presence of thetransport container on the support.

In accordance with yet another exemplary embodiment of the presentinvention, a substrate loading device is provided. The substrate loadingdevice comprises a frame and a substrate transport container support.The frame is adapted for connecting the device to a substrate processingapparatus. The frame has a transport opening through which substratesare transported between the device and processing apparatus. Thesubstrate transport container support is connected to the frame forholding at least one substrate transport container. The supportcomprises a cover, and at least one detector. The cover covers at leasta portion of the support on which the at least one substrate transportcontainer is seated. The at least one detector is connected to the coverfor detecting when the at least one transport container is on thesupport. The cover is of unitary construction and has a resilientlyflexible tab. The detector comprises a member mounted to the tab foreffecting detection, with the detector, of the at least one transportcontainer on the support.

In accordance with still another exemplary embodiment of the presentinvention, a substrate loading device is provided. The device comprisesa frame and a transport container shuttle. The frame is adapted forconnecting the device to a substrate processing apparatus. The frame hasa transport opening through which substrates are transported between thedevice and processing apparatus. The transport container shuttle isadapted for holding a substrate transport container and is movablyconnected to the frame. The shuttle is movable relative to the framebetween a first terminal position and second terminal position. Thesecond terminal position is variable for maintaining a predetermined gapbetween a surface of the transport container on the shuttle and framesurface when different transport containers are transported by theshuttle to the second terminal position.

In accordance with still yet another exemplary embodiment of the presentinvention, a substrate loading device is provided. The device comprisesa frame, a transport container shuttle, and a sensor. The frame isadapted for connecting the device to a substrate processing apparatus.The frame has a transport opening through which substrates aretransported between the device and processing apparatus. The transportcontainer shuttle is adapted for holding a substrate transportcontainer, and is movably connected to the frame. The shuttle is movablerelative to the frame between a first terminal position and a secondterminal position. The sensor is connected to the frame for remotelysensing a feature of the transport container when moved by the shuttleand determining the position of the feature relative to the frame.

In accordance with still yet another exemplary embodiment of the presentinvention, a substrate loading device is provided. The substrate loadingdevice comprises a frame, a movable frame member, a drive and a sensor.The frame defines an opening through which substrates are transportedalong a substrate transport path between a substrate transport containeron an exterior side of the frame and an interior side of the frame. Themovable frame member is movably connected to the frame for blocking andunblocking the substrate transport path. The drive is connected to theframe for moving the movable frame member in a first direction tounblock the substrate transport path. The drive has a carry membercarrying the frame member in the first direction. The sensor is capableof sensing a presence of a substrate. The sensor is movably connected tothe carry member independent of the frame member. The carry membercarries the sensor in the first direction when moving the frame memberin the first direction. The sensor is movable relative to the frame in asecond direction different from the first direction. The sensor ismovable in the second direction to a position where the sensor iscapable of sensing the presence of a substrate in the transportcontainer.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing aspects and other features of the present invention areexplained in the following description, taken in connection with theaccompanying drawings, wherein:

FIG. 1 is a schematic perspective view of a substrate processingapparatus, incorporating features of the present invention in accordancewith one exemplary embodiment, and substrate transport containers T;

FIG. 2 is a partial perspective view illustrating the front of a loadport module of the processing apparatus in FIG. 1;

FIG. 3 is another partial perspective view of a frame of the load portmodule in FIG. 2;

FIG. 4 is a perspective view illustrating a rear side of the load portmodule in FIG. 3;

FIG. 5 is another perspective view illustrating the load port module inaccordance with another exemplary embodiment of the present invention;

FIGS. 6-6A respectively are yet another perspective view showing therear of the load port module, and a side elevation of the load portmodule;

FIGS. 7A-7D respectively are a perspective view of a transport containersupport of the load port module in FIG. 3, a top plan view of thesupport, and front and side elevation views of the support;

FIG. 8 is partial perspective view of the transport container support inFIG. 7A showing an integrated container detection switch of the support;

FIGS. 9A-9B respectively are a perspective view of an exemplarysubstrate transport container T, according to the prior art, as itappears from different directions;

FIG. 10 is a schematic perspective view of a substrate transportcontainer clamping system of the load port module;

FIG. 11 is yet another partial perspective view illustrating a sectionof the load port module, and a substrate transport container T in adocked position on the load port module (portions of the load portmodule are omitted for clarity), with a movable portion of the load portmodule located in a first position;

FIG. 12 is still yet another partial perspective view of the load portmodule and substrate transport container similar to the view in FIG. 11,but showing the movable portion in another position; and

FIG. 13 is a block diagram illustrating a method in accordance with anexemplary embodiment of present invention.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENT(S)

Referring to FIG. 1, a perspective view of a substrate processingapparatus 10 incorporating features of the present invention isillustrated. Although the present invention will be described withreference to the embodiment shown in the drawings, it should beunderstood that the present invention can be embodied in many alternateforms of embodiments. In addition, any suitable size, shape or type ofelements or materials could be used.

In the embodiment illustrated in FIG. 1, the apparatus 10 has beenshown, for example purposes only, as having a general substrate batchprocessing tool configuration. In alternate embodiments, the substrateprocessing apparatus may have any other suitable configuration, as thefeatures of the present invention, as will be described in greaterdetail below, are equally applicable to any substrate processing toolconfiguration including tools for individual substrate processing. Theapparatus 10 may be capable of handling and processing any desired typeof flat panel or substrate such as 200 mm or 300 mm semiconductorwafers, semiconductor packaging substrates (e.g. high densityinterconnects), semiconductor manufacturing process imaging plates (e.g.masks or reticles), and substrates for flat panel displays. Theapparatus 10 may generally comprise a front section 12 and a rearsection 14. The front section 12 (the term front is used here forconvenience to identify an exemplary frame of reference, and inalternate embodiments the front of the apparatus may be established onany desired side of the apparatus). The front section 12 has a system(as will be described in greater detail below) providing an interfaceallowing the importation of substrates from the fab into the interior ofthe apparatus 10. The front section 12 also generally has a housing 16and automation components located in the housing handling substratesbetween the rear section 14 and the front section interface to theexterior. The rear section 14 is connected to the housing 16 of thefront section. The rear section 14 of the apparatus may have acontrolled atmosphere (e.g. vacuum, inert gas), and generally comprisesa processing system for processing substrates. For example, the rearsection may generally include a central transport chamber, withsubstrate transport device, and peripheral processing modules forperforming desired manufacturing processes to substrates within theapparatus (e.g. etching, material deposition, cleaning, baking,inspecting, etc.). Substrates may be transported, within the fab, to theprocessing apparatus 10 in containers T. The containers T may bepositioned on or in proximity to the front section interface. From thecontainers, the substrates may be brought through the interface into thefront section 12 using automation components in the front section. Thesubstrates may them be transported, via load locks, to theatmospherically controlled rear section for processing in one or more ofthe processing modules. Processed substrates may then be returned, in asubstantially reversed manner, to the front section 12 and then to thetransport containers T for removal.

The front section 12, which may otherwise be referred to as anenvironmental front end module or EFEM, may have a shell or casingdefining a protected environment, or mini-environment where substratesmay be accessed and handled with minimum potential for contaminationbetween the transport containers T, used to transport the substrateswithin the FAB, and the load locks 14L providing entry to the controlledatmosphere in the rear processing section 14. Load ports or load portmodules 24 (one or more in number as will be described further below)are located on one or more of the sides of the front section providingthe interface between the front section and FAB. The load port modulesmay have closable ports 300 forming a closable interface between theEFEM interior and exterior. As seen in FIG. 1, the load port modules mayhave a support area for a substrate transport container T. A secondaryholding area may also be provided under the support area, wheretransport containers may be temporarily buffered. The transportcontainer support area may allow automated movement of the transportcontainer T supported thereon to a final or docked position. Properplacement of the transport container T on the support area, beforemovement, may be detected and verified with detection switches integralto the cover or casing of the support area. Positive engagement or lockdown, again prior to movement, of the transport container, in the loadport support area may be achieved with actuated clamps of the load portas will be described further below. Transport of the transport containeron the support area of the load port to the final or docked position(i.e. the position of the transport container proximate to the portthrough which substrates are transported between the transport containerand the interior of the EFEM casing interior) may be detected by atouchless (i.e. contamination free) position sensor. In cooperation withthe apparatus control system, the position sensor operates to repeatedlyestablish the transport container docked position with minimal clearancebetween container and load port frame despite the tolerance variation inthe dimensions of the transport container, as will be described furtherbelow. Also, as will be described below, pinch detection duringautomated movement of the transport container may be provided by one ormore sensors monitoring current to the transport motors. The pinchsensors are connected to the control system, that has programming toautomatically stop and reverse direction of travel upon receiving anappropriate signal from the pinch sensors. The port door, of the loadport module, may engage the transport container when in the dockedposition in order to open the transport container while, as will be seenfurther below, also opening the access port 300 in the load port frame,to provide access to substrates within the transport container as wellas access for transporting the substrates between the container and EFEMinterior. Engagement between the port door and transport container maybe effected by independently operable keys with independent sensors fordetecting improper engagement or operation as will be described below.The port door may be mounted on a resiliently flexible mount stablysupporting the door while providing the door with sufficient range ofmotion when opening to clear the access port frame or other load portmodule structure obstructions. Additional movement of the door to openthe port for substrate transport may be accomplished with a drive thatis pivoted into a position so that door movement, when opening/closing,is substantially parallel with the face of the EFEM. The load portmodule may have a sensor for detecting the presence of substrates insidethe transport container. The sensor is actuated to access the transportcontainer interior and moved to scan the interior of the transportcontainer simultaneous with the movement of the port door to open theaccess port. The sensor is connected to the control system to identifypresence, position and orientation of the substrates inside thetransport container. Another feature, as will be described furtherbelow, is that the load port module may be an intelligent load portmodule. The load port may have an integrated user interface,communicably connected to the control system, controllers and sensors,allowing a user to locally input data, information, and programming foroperation and health status monitoring of the processing apparatus. Theuser interface may have a graphics display integrated to the load portmodule capable of graphically displaying information regarding desiredoperational status and health status data of the apparatus, as well asany desired accessible information available in the control system. Theuser interface may have suitable I/O ports for connecting peripheraldevices, such as a teach pendant, and allowing bi-directionalcommunication with the peripheral devices when connected to the userinterface. The load port module may further be provided with a cameralocated for viewing motions of desired automation components. The cameramay be communicably connected to the control system, which is suitablyprogrammed to identify from the camera signal errors in the motions ofthe automation components. The display of the user interface may displaythe view frames or video stream generated by the camera.

In greater detail now, and with reference also to FIG. 2 which is aperspective view of the load port module 24 of the processing apparatusin accordance with this exemplary embodiment, the load port module 24has a frame 29 that may generally define (as noted before) a transportcontainer holding or support area 28 and a closable port 300 throughwhich substrates are transported in and out of the mini-environmentinside the front section housing 16. The housing 16 and load port module24 of the EFEM are connected, as will be described further below, toform a chamber or space 25 that is substantially closed from theexterior, and as noted before, provides a controlled or mini-environmentwithin the front section 12. For example, the front section may includea controlled air flow system (not shown), such as vents, louvers,laminar flow system, to avoid particulate contamination from enteringthe mini-environment in the front section 12. As seen in FIGS. 1 and 2,the transport container holding area 28 of the load port module 24 mayhave a primary or first station 36 and a secondary station 34. In thisembodiment, each station 36, 34 of the holding area 28 may be capable ofholding a transport container T, though in alternate embodiments, thetransport container holding area may have more or fewer holdingstations, and each holding station may be capable of supporting anydesired number of substrate transport containers. The transportcontainer T shown seated on the holding stations 36, 34 are depicted forexample purposes as being front opening uniform pods (FOUPs) stylecontainers, though in alternate embodiments, the holding stations of theload port holding area may be capable of supporting any desired type oftransport container such as SMIF containers. In the embodiment shown inFIG. 1, the front section 12 has the load port modules 24 located on thefront face 12F of the front section 12 for example purposes. In thislocation, the load port module 24 may be positioned to facilitateplacement and removal of transport containers T, onto at least oneholding station 34, 36 of the load port module holding area 28, using anautomated material handling system (AMHS) (not shown), such asAeroLoader® from Brooks Automation, Inc. As seen in FIGS. 1-2, the loadport module holding area projects forwards from the face 12F of thefront section, and access for removal/placement, with the AMHS, of thetransport containers T onto the holding area 28 may be from the top orfront. In alternate embodiments, the load port module may be located onother sides of the front section as desired. In still other alternateembodiments, the load port modules may be located on two or more sidesof the front section 12. As seen in FIG. 2, the load port module 24 inthis exemplary embodiment may have an extension zone 38 projectingoutwards from the base plate of the load port module 24.

Referring now also to FIG. 3, there is shown a perspective view of theframe 29 of the load port module 24. In the exemplary embodiment, theframe 29 may comprise a base plate 292 and stiffener rails 294. The baseplate 292 and rails 294 may be made of steel, such as any commerciallyavailable standard structural steel (e.g. ASTM A36) rolled or stampedplates or sections of desired thickness to suit the anticipated loads onthe frame. If desired, the base plate and rails may be made ofhigh-strength steels (e.g. ASTM A242) in order to further reduce theweight of the load port modules. In alternate embodiments any desiredmetal may be used. The base plate 292 may be sized as desired relativeto the dimensions of the mounting face 12F of the front section 12. Inthe embodiment shown in FIG. 1, the front section 12 has two load portmodules 24 that are substantially the same, (though in alternateembodiments the front section may have fewer or more load port modulesas desired). Accordingly, the frame 29 of each load port modules 24 mayextend for example about half the width of the front section. The heightof the base plate 292 may extend for example the full height of thefront section, or some lesser portion thereof to allow proper interfaceand seal with the front section housing 16. As seen in FIG. 3, the rails294, which are illustrated as having a general channel cross-section forexample purposes, are placed at the lateral edges of the base plate 292in this exemplary embodiment. In alternate embodiments, the rails mayhave any desired standard rolled or stamped section (e.g. T, angle,etc.) and may be located as desired on the base plate to provide theframe with the desired strength and flexural stiffness. If the desiredshape/size is not standardly available, the desired shape/size may bereadily formed by cutting part of one or more flanges on a standardsection. In this embodiment, the base plate 292 may have raised flanges292F (see FIG. 3) at one end and may be shaped (e.g. by stamping orrolling) to form an outward projecting channel 2910 at another end. Therails 294 and raised flanges 292F and channel 2910 may be connected toform a general structural box configuration (which minimizes framewarping) and provides a self supporting structure. In alternateembodiments, the base plate may be shaped in any other desired manner,and the rails, which may be more or fewer in number, may be positionedas desired to provide the desired structural properties. In thisembodiment, the base plate 292 and rails 294 may be welded together,such as by SMAW, MIG or TIG welding. The welds may be spot or continuouswelds. In alternate embodiments, the base plate and rails may bestructurally joined by and desired means such as brazing, pressure orchemical bonding or mechanical fastening. In still other embodiments,the frame base plate and rails may be integrated during formation of theframe, so that the frame is a one-piece member of unitary construction.As a self supporting structure, the frame around the load port module(LPM) 24 to be transported, with all LPM components (described below)mounted to the frame, as a unit with no further brazing or support tomaintain structural adequacy.

As seen best in FIG. 3, in this embodiment the base plate 292 hasopening 2912, formed in portion 2910, and opening 2914 formed in thelower portion of the plate. As noted before, an opening 2916 is alsoformed in the base plate 292 defining the access port 300 of the loadport modules. Opening 2912 may be centered on the base plate centerline, and is sized to suit a graphics display of the user interface 102(see FIG. 2) as will be described in greater detail below. In alternateembodiments, the display opening may have any suitable location, sizeand shape for locating and mounting a graphics display to the frame. Asseen in FIG. 3, the opening 2914, in embodiment the lower portion of thebase plate, is substantially surrounded by generally box shaped wall298. The box shaped wall 298, may be made of sheet metal, such as steel,and may be joined to the base plate 292 by spot welding, chemicalbonding or any other desired means. The box shaped wall 298 may belocated in extension portion 38 (see FIG. 2) of the load port module.The box shaped wall 298 may form a casement and support for theoperating mechanism of the access port door 30D (see FIG. 1) as will bedescribed further below. In this embodiment, and as will be seen furtherbelow, the door operating mechanism extends through opening 2914 forengagement with the door. Locating the door operating mechanism withinthe extension portion 38, removes or at least minimizes the spacededicated for the door operating mechanism within the front sectionhousing 16. This in turn may allow reduction of the size of the frontsection housing 16 compared to conventional apparatus.

In this embodiment, the opening 2914 in the base plate may not be closedor sealed, resulting in free communication between the interior of thefront section housing 16 and space within box walls 298. The box walls298 may be covered by flashing or cover 38C (see FIG. 2) that closes thefront side of box walls 298. The cover 38C may be sealed to base plate292 or other structure of the load port, so that when the load portmodules 24 are connected to front section housing 16, the minienvironment within the front section may extend through opening 2914into the extension region 38 of the load port modules. In alternateembodiments, the frame of the load port module may not have an openingfor the door operating mechanism to extend through the frame. As will bedescribed in greater detail below, a portion of the frame 29 may beremovably mounted to provide ready access to LPM components.

Still referring to FIG. 3, the frame 29 has support structure 296 forthe transport container holding area 28. The support structure 296 maybe formed by rolling, stamping or bending steel (or any other desiredmetal) plate or sheet into the desired configuration. In the embodimentshown, the support structure is formed to have a flanged channelconfiguration with a flat upper section 296H, vertical end walls 296 andinwardly projecting flanges 296F. Structure 296 may be of unitaryconstruction, such as when formed by bending a single piece of sheetmetal into the desired configuration. In alternate embodiments, thesupport structure may be a weldment or assembly of a number of piecessuch as for example forming the structure into two similar pieces joinedat a center seam line by welding, brazing, bonding or fastening. Afterformation of structure 296, it may be attached to the base plate 292 ofthe load port frame by any suitable means including spot welding,brazing, bonding or mechanical fastening. As shown in FIG. 3, thesupport structure 296 is located above the box wall 298, and if desiredthe box wall may be extended and joined to the support structure 296,thereby providing increased rigidity to the frame 29. The supportstructure 296, in this embodiment may also be extended so that it istied in structurally, for example by welding, to the rails 294 boundingthe lateral sides of the base plate again for increased rigidity. Inalternate embodiments, the transport container holding area supportstructure may not be joined to the side rails of box wall of the loadport module frame. Fabrication of the load port module frame 29 usingstandard commercial plate and standard section members to the greatestextent possible, as described above, significantly reduces the cost andtime associated with fabrication of the load port module frame comparedto conventional apparatus. Conventional fabrication of load port moduleframes generally uses members either machined to the final configurationfrom stock billet, or otherwise especially cast or formed into the finalshape, that are joined together mechanical fastening to form the frame.

Referring now also to FIG. 4, there is shown another perspective view ofthe load port module 24 as seen from a direction (rear) opposite to thatin FIG. 2. As seen in FIGS. 3 and 4 the frame 24 may be provided withcontrolled or datum surfaces 296D1, 296D2, 294D1-294D4 to provide properorientation and alignment between interfacing items mounted to or placedon the load port module frame, as well as provide proper orientation andalignment of the load port module 24 itself (and any components mountedthereto) and any other interfacing components of the front or rearsections 12, 14 of the apparatus. For example, datum surfaces indicatedby lines 2916D1, 2916D2 may be established around the edges of theaccess port hole 2916 in base plate 292. The surfaces at the edges ofthe hole 2916 may be contacted by the port doors 30D (see also FIG. 2)when the port is closed, and it is desired that flatness as well asplanarity (relative to both vertical and horizontal axis) of thesurfaces be controlled. The transport container holding area supportstructure 296 may also be provided with datum surface, such as forexample 296D1, 296D2 that establish the flatness as well asorthogonality of the support structure 296 relative to for example thedatum surfaces 2916D1, 2916D2 at the access port. This helps ensureproper and repeatable alignment for interface between any transportcontainer positioned on the holding area 28 and the door of the accessport as will be described further below. As seen in FIG. 4, datumsurfaces/lines 294D1-294D4 may be provided on the rear side of the loadport modules frame to control the flatness and planar orientation of thesurfaces 294I interfacing the load port module 24 to the housing. Theinterface surfaces 294I may be provided with a BOTLS type interface (notshown) for securing the load port module 24 and front section housing 16to each other. In alternate embodiments, the load port module may haveany other desired interface type. Regardless of the type of interface,the system of datum surfaces/lines 294D1-294D4 on the rear side of theload port module frame provide a reference system enabling repeatablealignment of the load port module 24, and components mounted thereto, tothe front or rear sections 12, 14 of any apparatus similar to apparatus10. This enables load port modules with frames similar to frame 29 to beinterchanged between different apparatus. The datum surfaces on theframe 29 may be provided, if desired after completion of fabrication ofthe frame, by local machining or any other desired means. The surfacesmay be identified by using a test bench or jig, or using an opticalalignment system. Machinable stock or shims may be provided as desiredto build up surfaces prior to forming the datum surfaces. An adapter(not shown), an example of which is discussed in U.S. patent applicationSer. No. 09/600,829, filed Feb. 11, 1999 incorporated herein byreference, may be used to interface the load port module 24 to thecasing 16 of the EFEM.

As seen in FIG. 4, the load port modules frame 29 may include integralmounting surfaces and structures 2918, 2920 for supporting desiredautomation components located in the front section mini-environment. Asnoted before, the front section 12 of the processing apparatus mayinclude various automation components used in the transfer of thesubstrates between the transport container T (seated on the load portmodules as shown in FIG. 1) and the rear section 14 of the apparatus 10.By way of example, in this embodiment, the front section 12 may includeautomation components such as a transport container mapper 200 (see alsoFIG. 6), a substrate transport apparatus 40 (see also FIG. 5) an aligner42 (see also FIG. 5), and a substrate buffer 44. The mapper 200, will bedescribed in greater detail below, but is positionable to map thesubstrates located inside the transport container T on the holding area28. The substrate transport apparatus 40 is shown schematically in FIG.5. The transport apparatus 40 may generally include a transport portion40A capable of holding and transporting a substrate in θ (rotational)and R (radial) motion (as indicated by the θ and R arrows in

FIG. 5). If desired, the transport apparatus 40 may also include alateral carriage system 40C capable of moving, in this embodiment,portion 40A laterally across the load port module as indicated by arrowL in FIG. 5. The θ, R movement portion 40A may be of any suitable typeand configuration such as a SCARA type arm. Transport portion 40A hasbeen illustrated schematically in FIG. 5, as having a SCARA typeconfiguration (only two links of the arm are shown, the end effector isomitted for clarity) for example purposes. A suitable example of a SCARAtype arm that may be used in the apparatus 10 is the AcuTran 7 Robotfrom Brooks Automation, Inc. In alternate embodiments, the θ, R movementtransport portion may have any other desired configuration. Thetransport portion 40A may be movably held in a housing or casing 40A1with a drive for moving the transport portion 40A in the vertical or Zdirection as indicated by the arrow Z in FIG. 5). The casing 40A1 may bemounted on the carriage (not shown) of the lateral carriage system 40C.The aligner 42 (shown in phantom in FIG. 5) may be of any suitable type,such as the Brooks Automation Inc. AcuLigner 7. The aligner 42 ispositioned to allow the transport apparatus 40 to pick/place substratesthereon. The buffer 44, may have any suitable configuration allowingbuffering of a desired number of substrates inside the front section 12.In alternate embodiments, the front section may have other differenttypes of automation components, or more or fewer of similar automationcomponents (e.g. more than one mapper, aligner). As noted before, inthis embodiment the mapper 200, transport apparatus 40, aligner 42 andbuffer 44 may be mounted (either directly or indirectly) to the loadport module frame 29 to be integral to the load port module 24.Accordingly, installation or removal of the mapper, transport apparatus,aligner and buffer module to and from the front section 12 isaccomplished upon installation or removal of the load port moduleitself. In addition, one or more of the load port module components, forexample the transport apparatus, aligner and buffer may be mounted on asub-module (not shown) or the load port module 24 that may be removedand installed onto the LPM when the LPM is mounted to the casing 16.Another example of what a removable sub-module for the LMP is describedin U.S. Provisional Application 60/579,862, filed Jun. 15, 2004 andincorporated by reference herein in its entirety.

As shown in FIG. 4, mounting surfaces or structures 2918, 2920 (shownschematically in FIG. 4) for the transport apparatus 40 depend from theframe 29. The surfaces or structures 2918, 2920 may be formed in anysuitable manner, and in the embodiment shown in FIG. 4, are located onthe rails 294 of the frame. In alternate embodiments, the transportapparatus mounting surfaces/structures may be located on any otherdesired portion of the frame with the desired strength and stiffness.The mounting surfaces 2918, 2920 may be positioned relative to thereference datums 294D1-294D4 of the frame 29, and may provide attachmentpoints for the lateral carriage system 40L, or in the cases where thetransport apparatus does not include the lateral carriage system, forthe casing 40A1 of the θ, R movement transport portion 40A. Similarly,mounting structure 2923C (see FIG. 5) may be provided for mounting thealigner 42 to the load port module, as well as mounting structure (notshown) for mounting the buffer to the load port module frame. Thesesupport structure are also positionally controlled to the referencedatums 294D1-294D4 of the frame, within desired tolerances. The frames29 of the load port modules, and hence the load port modules may thus befully interchangeable with other similar load port modules.

The load port module frame 29 further comprises lateral interfacesystems 2922, 2924 (see FIG. 4) allowing the load port modules to beattached side by side forming a super or compound module 241 as shown inFIG. 5. In this embodiment, one lateral interface system 2922, 2924 isprovided on each of the lateral sides of the load port module 24.Accordingly, other modules may be attached to either or both sides ofthe load port module frame. The interface system 2922, 2924 between loadport modules may include alignment means 2922A, 2922P (only thealignment means for system 2922 are shown, though system 2924 issimilar) to align the modules being attached to each other. For example,in this embodiment the alignment means may include holes 2922A preciselylocated relative to desired datums, such as datums 294D2, in rails 294.Three holes 2922A are shown in FIG. 4, though in alternate embodimentsthe alignment means may include any desired number of holes. Thealignment means may further include dowel or fitted pins 2922P forinsertion into each of the holes 2922A (only one pin 2922P is shown inFIG. 4 for example purposes). The corresponding pins 2922P may beinserted through respective alignment holes 2922A in the frame 29 of oneload port module and through the matching holes (not shown) similar toholes 2922A in the adjoining load port module frame. This establishesalignment of adjacent load port modules to each other and to the globalreference. After alignment, the local reference datums (forming a datumplane for each load port module as exemplified by reference datums294D1-294D3 for frame 29) are substantially co-planar with the referencedatum plane 29D5 of the super module shown in FIG. 5. The interfacesystems 2922, 2924 may also include lateral seating surfaces (onlysurface 2924S is visible in FIG. 4) and seals 2924O. The seatingsurfaces, such as surface 2924S allow the adjacent load port modules tobe abutted together, and seals 2924O (which may be formed from anysuitable elastomer, or viscoelastic material) seal the gaps betweenadjacent frame members to maintain the mini-environment across the faceof the compound module. A fastening system (not shown) of mechanicalfasteners for example, or attachment by welding, or bonding may be usedto secure load port modules to each other. In this manner any desirednumber of load port modules 24 may be attached side by side.

FIG. 5 is a perspective view of a compound load port module 24′ formedby attaching a number of load port modules 24A, 24B, 24C side by side.In the embodiment shown, the compound module 24′ include threeindividual load port modules 24A, 24B, 24C. In alternate embodiments,the compound module may be formed from any desired number of individualload port modules. Load port modules 24A, 24B, 24C are substantiallysimilar to load port module 24 described before and shown in FIGS. 2-4.The load port modules 24A, 24B, 24C are attached to each other withinterface systems similar to interface systems 2922, 2924 (see FIG. 4)that both align the individual modules to reference datum plane 29D5 (asdescribed before) and join the individual modules to form a singleintegrated unit. The frame 29′ of the compound module 24′ is theintegrated composite of frames 29A, 29B, 29C of the individual modules.The compound load port module 24′ may thus be installed, or removed as aunit, along the combined automation components 40, 42 attached thereto,from the front section 12 of the apparatus. In the embodiment shown inFIG. 5, the transport apparatus 40 may be mounted to mounting structuressimilar to mounting structures 2918, 2920 of one or more of the moduleframe 29A, 29B, 29C. The lateral carriage system 40C in this embodimentextends along all three modules 24A, 24B, 24C. Accordingly, thetransport portion 40A is capable of traversing (in the directionindicated by arrow L) the entire width of the compound module 24. Inalternate embodiments, one or more of the modules, in the compoundmodule, may have a dedicated transport apparatus mounted thereto. In theembodiment shown in FIG. 5, module 24C has support structure 2923C formounting aligner 42. In alternate embodiments, the aligner supportstructure may be on any of the individual modules forming the compoundmodule. As noted before the frames of individual modules 24A, 24B, 24Cenable the modules to be tied together, without any additional framesupport members, to form compound modules of any desired width (as shownin FIG. 5). Nevertheless, the frame 29 of each individual module 24,24A, 24B, 24C enables each module to be independently mounted to thefront section housing 16.

Referring again to FIGS. 1-3, the transport container holding area 28,of the load port module 24 may have both an upper 36 and lower 34support station, each support station 36, 34 may be capable of holdingor supporting a transport container T as shown in FIG. 1. In thisembodiment, the lower station 34 is located generally under the upperstation 36. The lower station 34 may comprise opposing members 34L (onlyone of which is shown in FIG. 3) capable of conformally engagingstructure of the transport container T so that when placed in the lowerstation 34, the transport container is supported from members 34L. FIGS.9A-9B respectively are front and bottom perspective views of anexemplary substrate transport container T. The container T in FIGS.9A-9B is shown as having FOUP type configuration. In alternateembodiments, the substrate container may have any other desiredconfiguration as seen best in FIG. 9A, transport container T generallyhas a casing T2 and a casing cover or door T4 removably connected to thecasing. The casing T4 has an upper surface T6 with a fixture T8projecting therefrom. The fixture T8 may include lateral flanges oroutwardly projecting seating surfaces T10 that are offset a distancefrom the upper surface T6 of the casing. The seating surfaces T10 may bepart of a handling flange conforming to SEMI; E47.1-1001. The seatingsurfaces T10 may serve for engaging the coupling portion (not shown) ofa container transporter of an automated material handling system (suchas AeroLoader®) and thereby supporting the container from thetransporter. Referring again to FIGS. 2-3, the support members 34L ofthe lower station 34 on the load port module holding area 28, are shownin this embodiment as having an angle or general L shaped configuration.The members 34L have inward projecting flanges 34F as shown. Inalternate embodiments, the support members 34L may have any othersuitable shape. The support members 34L may be for example metal,plastic, or any other suitable material, and may be connected as shownin FIG. 3 to support structure 296 of the load port frame 29. Theinwardly pointing flanges 34F are sized to be admitted between seatingsurface T10 (see FIG. 9A) on the transport container and upper surfaceT6 of the container. The flanges 34F of the opposing members 34L aresufficiently separated to allow insertion of support fixture T8 of thecontainer T between the flanges with the outward projecting seatingsurfaces T10 overhanging (at least partially) the corresponding flanges34F. Accordingly, when loaded into the lower station 34, the transportcontainer T is supported by seating surfaces T10 seated on the flanges34F.

In this embodiment, the transport container T may be manually positionedby an operator on the lower station 34, by inserting the container (inthe direction indicated by arrow I in FIG. 2) so that fixture T8 ismoved in between flanges 34F. In alternate embodiments, the supportmembers of the lower support station may have any other desiredorientation to allow the transport container to be positioned from anyother desired direction. Removal of the transport container T from thelower station 34 may be accomplished in a substantially reverse manner,with the user manually withdrawing the container in the oppositedirection from installation. The lower support station 34 provides theload port module with another container stowage location where the usermay place a transport container T in the case when the upper supportstation 36 is either occupied by another transport container or is insome state (such as testing) preventing placement of the transportcontainer T on the upper station. As noted before, in alternateembodiments, the load port module may not have a lower support stationin the transport container holding area 28.

Referring now again to FIG. 2, the upper support station 36 of thetransport container holding area 28 on load port module 24, generallycomprises a base support or shelf 50 and a carriage or shuttle 52movably mounted on the shelf. A shuttle drive system 54 operablyconnects the shuttle 52 to the shelf 50 and is capable of moving theshuttle 52 on the shelf. The drive system 54 moves the shuttle (in thedirection indicated by arrow M in FIG. 2) between a first position and asecond position. As will be described further below, the shuttle 52 isconfigured to allow placement of a transport container T thereon. Thefirst shuttle position may be disposed such that the transport containerT may be positioned automatically on (or picked off) the carriage by theautomated material handling system (not shown). The second position towhich shuttle 52 may be moved, is located so that the transportcontainer T on the shuttle may be docked to the door 30D (see FIG. 1) aswill be described further below. When the shuttle is in this secondposition, the transport container T thereon is located in what will bereferred to for convenience purposes as the docked location. Thecontroller 400 is communicably connected to sensors on the shuttle andthe drive system as will be described further below.

As seen in FIG. 1, the transport container T is placed on the shuttle 52with the bottom surface of the container seated on the shuttle. Theshuttle 52 is hence configured, as will be described further below toconformally engage the bottom of the transport container T. FIG. 9B is abottom view illustrating features of the bottom T3 of the exemplarysubstrate transport container T. In this embodiment, the bottom T3 ofthe transport container has features generally conforming tospecification in SEMI E47.1. In alternate embodiments, the bottom of thesubstrate transport container may have any other desired features. Inthis case bottom T3 generally includes carrier sensing pads T12, oneeach of a front end of line (FEOL) and back end of line (BEOL)information pads T14, T16, a carrier capacity (i.e. number of substrateholding locations) information pad T18 and a box or cassette informationpad T20. The container bottom T3 may further include slots T22 forengagement by locating/kinematic coupling pins on the shuttle. A firstrecess T24 into the bottom surface is provided as a first retentionfeature. The bottom of the container also has a second retention featureT26 formed therein. The second retention feature generally comprises agenerally circular recess T30 formed into the bottom that has an outeraperture T32 with substantially squared off edges T34 (formingengagement lips T36).

FIGS. 7A-7D, are respectively a schematic perspective, a top plan, frontand side elevation views of the shuttle 52 and part of the support shelfstructure on which the shuttle sits (the support shelf structure 50 isvisible only in FIGS. 7C-7D). The shuttle 52 generally comprises achassis or frame 55 and a cover 56 positioned over the chassis. Theshuttle 52 may also generally have locating features 58 for helpinglocate the container T properly onto the shuttle, coupling features 60for positive coupling of the seated container T to the shuttle, anddetection system 62 for detecting the presence and accurate placement ofthe container T on the shuttle 52. Referring now also to FIG. 8, showinga partial cutaway view of the shuttle 52, chassis 55 may have anysuitable shape, and may be made from any suitable material, able tosupport the static and dynamic loads associated with placement andremoval of the transport container T on the shuttle as well as movementof the container and shuttle between the first and second positions. Thechassis 55 may have a motion system (not shown) such as rollers orslides allowing free movement of the shuttle 52 (in the directionindicated by arrow M in FIG. 2) relative to the support shelf 50 of theload port module frame. Support shelf 50, shown partially in FIG. 8,(see also FIG. 2) may be formed by support structure 296 of frame (seeFIG. 3). The shelf 50 may include tracks or rails (not shown), formed onor depending from frame structure 296 (for example the top plate 296H orside plates 296E) on which the motion system of the chassis 55 rides.The container locating features 58, coupling features 60, detectionsystem 62 and cover 56 are mounted to the chassis 55.

As seen best in FIGS. 7A-7B, in this embodiment container locatingfeatures 58 on shuttle 52 may include a projecting engagement member 64.In this embodiment, the engagement member 64 may have a generalfrusto-pyramidal shape, generally conformal to the shape of locatingrecess T24 (see FIG. 9B) in the bottom T3 of the container. Theengagement member 64, may be anchored to the chassis 55, and projectthrough a suitable opening in the cover 56 sufficiently above the uppersurface 56U of the cover to engage the locating recess T24 in thecontainer when the container T is seated on the shuttle 52. Theengagement member 64 may have cam surfaces 64C for cooperating with theedges of the container locating feature in order to aid proper automaticpositioning of the container T onto the shuttle. In alternateembodiments, the shuttle may not have an engagement member like member64. In this embodiment, the shuttle 52 may have locating posts 66. Posts66 may serve both as locating features aiding correct positioning of thecontainer T on the shuttle 52, as well as to provide a means of positivecoupling (i.e. Kinsmatic coupling) the container T to the shuttle 52. Asmay be realized from FIGS. 7B and 9B, the posts 66 are positioned on theshuttle 52 to cooperate with slots T22 in the container bottom T3. Posts66, which may be formed from any suitable material, such as metal orplastic, may be anchored directly to the chassis 54 of the shuttle asshown in FIG. 8. The posts 66 may project through (suitable holes in)the cover 56 to engage the bottom of the container in slots T22 (seeFIG. 9B). In this embodiment, the posts 66 may define the supportingplane for the transport container T on the shuttle. The ends or tips 66Tof the posts 66 may have a generally conical or rounded shape as seen inFIGS. 7D and 8. This provides the desired three contact points betweenthe shuttle 52 and bottom of the container for precise and repeatabledefinition of the support plane for the container on the shuttle. As maybe realized, posts 66 support the weight of the container T, and hencehave a configuration, such as radial flanges shown in FIG. 8, todistribute the container weight to the chassis. The conical tops 66T ofthe posts 66 may also operate as caming surfaces against the inclinedsides of slots T22 in the container bottom mechanically guiding thecontainer along the support plane until the desired position (effectedby the geometry of the slots T22 and the tops 66T of posts 66) of thecontainer on the shuttle is established.

The detection system 62 of the shuttle 52 generally comprises a numberof switches 68 distributed over the area of the shuttle. The switches 68may be located on the shuttle 52 to cooperate with the carrier sensingpads T12, the FEOL and BEOL info pads T14, T16, the carrier capacity andcassette information pads T18, T20 on the bottom of the container. FIG.7B illustrates the positions of the pads T12-T20 on the bottom of thecontainer T overlaid on the cover 56 and switches 68 of the shuttle 52.In this embodiment, the switches 68 are generally of the same type andsimilar to each other and will be described below with reference to arepresentative switch. In alternate embodiments, different kinds ofswitches may be used in different locations on the shuttle correspondingto the different types of information capable of being relayed to thegiven switch by the different information pads T16-T20 of the containerT. The architecture of representative switch 68 is seen best in FIG. 8.In this embodiment, switch 68 may be an electro-optic switch generallycomprising a base or sensor portion 680 and an actuation portion 68I.Actuation portion 68I is spring loaded as will be described furtherbelow, and is actuated by contact with a corresponding pad on thecontainer bottom. The sensor portion 680 detects actuation of theactuation portion sending a signal to the control system. As seen inFIG. 8, sensor portion 680 may be mounted on a PCB 74 positioned on thechassis 55 of the shuttle. PCB 74 may have traces 68E formed therein forboth power and signal transmission. The traces 68E may be terminated tosuitable surface contacts (not shown) to which contact terminals ofelectronic components may be connected as desired (using any suitablemeans for mounting electronic components onto PCB's including flush wavesoldering). The contact terminals (both power and signal) of the sensorportion 680 may be connected to the traces 68E in the PCB 74 in asimilar manner. Mounting electronic components, such as the sensorportions of the switches 68 to a PCB with integral traces, serves toeliminate the individual conductors, as well as their costly and timeconsuming installation on the chassis, that would otherwise be used toconnect the components to the power supply and control system. Thetraces 68E in the PCB may extend to a terminal connector (not shown) towhich, for example, the connectorized end of a flexible wire harness 72(see also FIG. 7D) may be mated. As may be realized the wire harness maylink the traces 68E in the PCB 74, and hence the electronic componentssuch as the sensor portions of the detector switches 68 to the controlsystem 400 (see FIG. 2) and power supply (not shown). The sensor portion680 may have for example a suitable light source such as an LED and aphoto detector such as a photo cell. In the unactivated state of theswitch the light source may, for example, illuminate the photo cellwhich causes the sensor portion to send a signal (via traces 68E) to thecontrol system 400 that is interpreted by the control system as beingthe inactivated state of the switch. Upon obstruction of the lightsource, such as by some portion of the actuation portion 68I of theswitch, the signal from the photo cell changes which in turn is read bythe control system as the switch now being in the actuated state. Inalternate embodiments, the sensor portion may be configured so the lightsource is obstructed when the switch is in the inactivated state, andilluminating the photo detector when in the activated state.

As seen in FIG. 8, the actuation portion 68I of the switch 68 isintegrated into the cover 56 of the shuttle. The spring biasing theactuation portion 68I is in this embodiment formed by a portion of thecover 56. The cover 56 of the shuttle 52 may be made for example ofplastic, or sheet metal or any other suitable material. In thisembodiment, cover 56 may be a one-piece member (i.e. of unitaryconstruction). In the case the cover 56 is plastic, it may be formed forexample by injection molding or any other suitable process. As seen inFIGS. 7A-7D, the cover 56 in this embodiment may have a generalhexahedron shape, with an upper surface 56U and perimeter walls 56Wprojecting from the upper surface. In alternate embodiments, the shuttlecover may have any other suitable shape. As seen best in FIG. 2, whenmounted on the chassis 55, the cover 56 serves to substantially enclosethe chassis within, with but a minor gap being provided between thebottom edge of the cover perimeter walls 56W and shelf 50 to facilitatefree relative movement of the shuttle while minimizing entry of dust orother particulates into the shuttle systems. The top surface 56U of thecover has through holes 56H formed therein as shown in FIG. 7A. Holes56H allow posts 66 to extend through the cover 56 as seen best in FIG.8. Holes 56H in this embodiment also serve to position the cover 56 ontothe shuttle chassis 55 as also shown in FIG. 8 (the clearance betweenthe hole edge and corresponding post 66 is sufficiently small, so thatthe post 66 provides accurate positioning of the cover 56 relative tochassis 55. Further, in this embodiment the rims of the holes 56H areseated on collars 66C of the posts 66, as shown in FIG. 8, therebysupporting the cover 56 from the posts. In alternate embodiments, thecover may have any other desired mounting system for attaching the coverand chassis. As seen in FIGS. 7A-7B, the upper surface 56U of the coverhas a number of resiliently flexible tabs or fingers 70 formed therein.The tabs 70 may be formed by any suitable means such as cutting the topsurface 56U of the cover 56. The number of tabs 70 may coincide with thenumber of switches 68 of detection system 62. In this embodiment, thereare eight tabs 70 formed into the upper surface of the cover. Inalternate embodiments, the cover may have any other desired number offlexible tabs formed therein. In other alternate embodiments, flexibletabs may be formed in any other desired surface of the cover. In theembodiment shown in FIGS. 7A-7B, the tabs 70 are substantially similarto each other, and hence, tabs 70 may have similar resiliently flexiblecharacteristics. In alternate embodiments, the shape (i.e. length,cross-section) of different tabs may vary to provide the different tabswith different flexibility characteristics. In this embodiment, the tips70E of the tabs 70 are located on the cover so that when the cover ismounted to the chassis each tip 70E is positioned substantially over thesensor portion 680 of the corresponding switch 68 (see FIG. 8). Inalternate embodiments, the tabs may be placed so that any other desiredportion of the tab (i.e. the tab mid-section) is positioned over thesensor portion of the corresponding switch. The tab orientation on theupper surface 56U of the cover may be otherwise selected as desired toprovide the tab with the flexibility of an unrestrained cantilever. Theorientations of tabs 70 shown in FIGS. 7A-7B are merely exemplary, andthe tabs may have any other desired orientation.

As seen best in FIG. 8, in this embodiment the actuation portion 68I ofthe switch 68 is mounted or located on the tip 70E of the correspondingtab 70. The actuation portion 68I may be of unitary construction withthe tab 70 (formed for example during the molding process of the coverupper surface) or may be mounted to the tab 70 with suitable bondingmeans such as adhesive. The actuation portion 68I projects sufficientlyfrom the upper surface 56U of the cover to come in contact with thecorresponding pads T12-T20 of the container placed on posts 66, and bythis contact generate sufficient deflection of the tab 70 to move theinterrupter flag portion 68F of the actuation portion to (e.g. obstructthe light source and) cause activation of the switch 68. When thecontainer T is removed from the shuttle 52, the flexible tab 70 resilesback to the undeflected position returning the switch to the inactivatedstate. As may be realized, if the container T is not properly placed onthe shuttle, there may be some misalignment between pads T12-T20 of thecontainer and at least some of the actuation portions 68I of theswitches 68 so that at least some of the switches do not activate. Thesignal combination of some switches activated and others not, may beinterpreted by the control system 400 as an indication of improperplacement of the container T on the shuttle. The control systemprogramming may then prevent motion of the shuttle 52 and commandcorrective action to correct placement or removal of the container fromthe shuttle.

As noted before, shuttle 52 may have a coupling feature 60 for positivecoupling of the transport container T to the shuttle. As also notedbefore, posts 66 serve as kinematic coupling means between the shuttleand container during shuttle motion. In this embodiment, the shuttlecoupling feature 60 may also include a container clamping system 61.FIG. 10 is a perspective view of the clamping system 61 in accordancewith one exemplary embodiment. The clamping system 61 generally has aclamp key 76 that is both movable up and down and rotatable to engagethe transport container through container retention feature T26 (seeFIG. 9B). In the embodiment shown in FIG. 10, the clamping system 61 hasa drive motor 74 that turns a lead screw 78. The clamp key 76 is mountedor otherwise connected to the lead screw 78 so that rotation of the leadscrew provides the clamp key with both axial and rotational movement aswill be described. The motor 74 may be any suitable type of motor suchas an AC or DC motor capable of bi-directional rotation. The motorcasing may be mounted to the shuttle chassis 55 as shown in FIG. 7D. Thelead screw 78, which may be any suitably sized lead screw is connectedto the output of the motor 74. The motor 74 is communicably connected tothe controller 400 which commands both direction of motor rotation aswell as the extent of rotation. The motor 74 may include an encoder orother suitable device for identifying shaft rotation and sending asuitable signal to the controller 400. As seen in FIG. 10, in thisembodiment the clamp key 76 has a coupling section 76C and a key section76K. The coupling section 76C is sized to be admitted through openingT34 in the container bottom, may have any suitable shape and has athreaded bore 76B sized to allow the clamp key 76 to be threaded ontothe lead screw. The key section 76K is positioned atop the clampingsection. The clamp key 76 may be of unitary construction, formed bycasting or billet machining. In alternate embodiments, the couplingsection and key section may be connected by any other suitable means. Asseen in FIG. 10, the key section 76K has a generally elongated shapewith projecting flanges 76R extending outward from the coupling section76C forming a general T shared configuration with the coupling section76C. The elongated shape of the key section 76K allows the key section76K to pass through the opening T34 (see FIG. 9B) of the containerretention feature only when the key section 76K is oriented so that itsmajor dimension is aligned with the major dimension of the opening 34.This orientation will be referred to as the insertion/removal positionof the key. As may be realized from FIGS. 9B and 10, rotation of the key(after insertion through opening T34 into recess T30) to an orientationwhere the key 76K major dimension is angled relative to the majordimension of opening T34 moves the flanges 76F to engage the engagementlips T36 of the container retention feature 26. In this embodiment, thekey 76K is in the engaged position when the major dimension issubstantially orthogonal to major dimensions of hole T34, and engagementbetween key flanges 76F and lips T86 is at a maximum.

To provide both axial movement of the key 76 (as indicated by arrow KAin FIG. 10 and used for insertion/removal of the key into the retentionfeature 26) and rotational movement of the key 76 (as indicated by arrowKR in FIG. 10 and used for key engagement/disengagement) with but asingle drive motor, the clamping system 61 in this embodiment may havean anti-backlash nut 80 and rotation stops 82, 84. The anti-backlash nut80 has a threaded bore so that the nut may be mounted on the lead screw78. The nut 80 also has stop surfaces 80 CW and 80 CCW for respectivelycooperating with the rotation stops 82, 84 to limit rotation of the nutat a desired rotational position. Stop surface 80 CW engages stop 82 tostop clockwise rotation of the nut, and stop surface 80 CCW engages stop84 to stop rotation of the nut in the counter clockwise direction. Therelative positions of the stops 82, 84 and stop surfaces 80 CW, 80 CCWon the nut are such as to limit the maximum rotation of the nut to about90° (the angular difference between the key insertion/removal andengaged positions) in this embodiment. For example, in FIG. 10 the nut80 is shown positioned with the clockwise stop surface 80 CW againstclockwise stop 82. An angular gap R is thus formed between the face ofthe counter clockwise stop surface 80 CCW and counter clockwise stop 84.The angular gap R in this position is equivalent to the maximum angulartravel of the nut, in this embodiment about 90°. In alternateembodiments, the geometry of the stops and stop surface on the nut maybe established in order to set the maximum rotation of the nut to anydesired amount. As seen in FIG. 10, the nut 80 and key 76 are mounted onthe lead screw 78 so that the upper surface 80S of the nut 80 is seatedagainst the bottom of key coupling portion 76C. A desired amount ofcompression preload between nut 80 and coupling portion 76C may beprovided (by relative rotation between nut 80 and coupling portion 76C)to generate desired amount of rotating friction between nut 80 and leadscrew 78 to ensure that the nut rotates substantially in unison with thescrew 78 when the nut rotation is not impeded by one of the stops 82,84. Clamping of the container to the shuttle 52 may be effected in thefollowing manner. After receiving indication from the detection system62 that container T is properly positioned on the shuttle 52, thecontroller commands operation of the motor 74 to rotate the screw 78 forexample in the counterclockwise direction. At the point after placementof the container T on the shuttle 52 but before commanding movement ofthe motor, the key 76 is positioned with key section 76K located insiderecess T30 (see FIG. 9B) of the container bottom T3 oriented in theinsertion/removal position. The nut 80 is engaged by the clockwise stop82. Counterclockwise rotation of the screw 78 rotates the nut 80 and key76 counterclockwise until the nut 80 engages the counterclockwise stop84 (in the embodiment about 90°). The key 76 has thus been rotated tothe engaged position (flanges 76F now overhang container engagement lipsT36). The controller 400 commands continued counterclockwise rotation ofthe screw 78 which causes the key 76 and nut 80 to be moved axially downclamping the container engagement lips T36 and hence the container tothe shuttle. The controller 400 stops rotation upon receiving data fromthe motor encoder that the screw rotation for the desired amount of keyaxial movement has been achieved. To unclamp the container, the screwmotion is reversed which at first causes the key 76 and nut 80 to liftoff container engagement lips T36 (initial friction between key andengagement lips allowing relative rotation between key/nut and leadscrew), then rotates the key 76 and nut 80 to the clockwise stop 82 (thekey now disengaged) and then moves the key and nut axially up to theinitial position. The container may then be removed from the shuttle.

In alternate embodiments, the single motor with an anti-backlash nutconfiguration of the clamping system may be replaced by a dual motorsystem. In that case the motors may be reversible stepper motors. Onemotor may be dedicated to providing axial motion of the key while theother may be dedicated to rotating the key between insertion/removal andengaged positions. The axial drive motor may be provided with a leadscrew (similar to lead screw 78 in FIG. 10) on which a base nut may berotatably mounted. Movement of the base nut during rotation of the leadscrew may be limited to axial motion by linking the base nut to a linearguide rail.

The rotational drive motor may be mounted or otherwise joined by asuitable transmission to the base nut so that axial motion of the basenut results in axial motion of the rotational drive motor. The clamp keymay be similar to clamp key 76 in FIG. 10 operable to clamp thetransport container through the retention feature T26 (see FIG. 9B). Theclamp key may be operably connected to the rotational drive motor sothat the key may be rotated, by the rotation motor, between theinsertion/removal and engaged position as described before. Axialmotion, generated by the axial motor, may be imparted through therotational drive to the clamp key. The stacked motor configuration maythus provide the key with both axial and rotational motion for clampingthe container T to the shuttle as described before.

Referring now again to FIGS. 2 and 7A-7D, shuttle 52 may be moved (inthe direction indicated by arrow M in FIG. 2) between the first orloading position and the docked position of the shuttle by drive system54. As seen best in FIGS. 7C-7D, the shuttle drive system 54 in thisembodiment generally comprises an electric motor 53 driving a lead screw57. In alternate embodiments, the shuttle may have any suitable type ofdrive system such as a pneumatic or hydraulic drive system. The electricmotor 53 in this embodiment may be any suitable type of motor such as anA.C. or D.C. motor, a stepper motor or servo motor. Motor 53 may befixedly mounted to the shelf structure 50. The lead screw 57 isconnected to the output shaft of the motor. The motor may be capable ofrotating the lead screw both clockwise and counterclockwise. The leadscrew 57 is also drivingly engaged to the chassis 55 of the shuttle.Engagement between the lead screw and chassis may be provided by anysuitable means such as for example a threaded bushing fixed to thechassis and threadably engaged by the lead screw. Rotation of the leadscrew 57 by motor 53 results in axial motion of the bushing over thelead screw, and hence of the chassis and shuttle 52 relative to theshelf 50 to which the motor is fixed. As seen in FIG. 7C the motor 53 iscommunicably connected to the controller 400 by a suitable circuit 91.The controller 400 may provide both command signals and power (from asuitable power supply) to motor 53 over circuit 91. The motor 54 mayinclude a motor encoder 58E (see FIG. 7D) for sending positionindication data to the controller. The controller 400 may be capable ofprocessing the motor encoder data to identify the position of theshuttle on the load port. In alternate embodiments, a linear encoder maybe mounted between the shuttle and support shelf to identify the shuttleposition during movement. As seen in FIG. 7C, in this embodiment circuit91 may also include a pinch protection circuit 90 capable of detectingan obstruction to shuttle motion. The pinch protection circuit mayinclude a current sensor 92, of any suitable type, and of desiredsensitivity capable of measuring current changes to motor 53. Thecurrent sensor 92 is configured as desired to monitor the currentsupplied to motor 53 through circuit 91. Measurement signals from thesensor 92 are transmitted by circuit 90 to the controller 400. The pinchprotection circuit 90 may be a closed loop or open loop system asdesired. As may be realized, when the shuttle is being advanced by thedrive motor 53 and encounters an obstruction, the current supplied themotor (via circuit 91) increases in general proportion to the level ofresistance to shuttle motion provided by the obstruction. The “excess”current is detected by sensor 92 and the information is relayed to thecontroller 400 via circuit 90. The sensor 92 may be capable of sendingraw or unprocessed sensor data to the controller 400. The controller maybe programmed (such as a suitable algorithm) to process the data fromthe sensor to identify, from noise, when excess current, of sufficientlevel and of sufficient duration to indicate an obstruction, is beingsupplied to the motor 53. Controller 400 has an auto-reverse program 402(see FIG. 1) wherein upon identification of the excess current (andhence of the obstruction to shuttle motion) the controller sends acommand signal to motor 53 stopping the previously commanded operationand reversing the motor direction. The rotation of the lead screw 57effecting movement of the shuttle 52 is thus also reversed therebycausing the movement of the shuttle to be reversed away from theobstruction. The shuttle may be reversed a predetermined distanceestablished from encoder 53E information. In alternate embodiments, thecurrent sensor 92 may be programmable to select desired set points fordetecting the excess current. In this case, the current sensor may senda suitable signal to the control upon detection of an excess currenthaving a level and duration exceeding the programmed set points. Uponreceiving the signal from the current sensor, the controller accessesthe auto-reverse program 402 in the controller memory. This providessuperior obstruction detection and recovery system at a lower cost thanconventional systems that employ a deflectable (i.e. pinch) bar.

Referring now again to FIG. 2, the load port module in the embodimentshown may have transport container advance detection system 110(depicted schematically in FIG. 2). The container advance detectionsystem 110 is a non contact system to detect a feature of a container Tmounted to and being advanced by the shuttle 52 and effect stopping theshuttle so that when the container is in the docked position the frontface of the container is in a desired repeatable location regardless ofthe tolerance variations between different containers. It is desirableto stop the load port shuttle advance motion so that there is a minimumclearance between the container and the load port frame 29 withoutactual contact between them. Since container dimensions will vary,especially between manufactures, in conventional systems the shuttlemovement is generally adjusted for “worst case”, allowing an overlylarge clearance in most instances. The container advance detectionsystem 110 of the load port module 24 overcomes the problems ofconventional systems allowing different containers to be stopped withthe front face at location L1 providing minimum clearance. The detectionsystem 110 in this embodiment has a “thru beam” sensor configurationwith an emitter or source of radiating energy and a detector fordetecting the radiating energy from the emitter. For example, in thisembodiment the detection system 110 may have a light source 112, such asa LED or laser diode on the terminal end of an optical fiber connectedto a suitable remote light source. The system 110 may also have asuitable light sensing portion 114 such as a photo cell for sensing thelight beam from the source 112. As seen in FIG. 2 the light source 112and sensor 114 are positioned on opposite sides of the shuttle 52 and ata desired height so that the container T mounted and transported by theshuttle 52 will break the light beam B emitted by the source 112 andilluminating at least the sensing part of sensor 114. Though not shownin FIG. 10, the light source 112 and sensor 114 may be housed insuitable covers for contact and particulate protection and to preventinadvertent interruption of the beam by objects other than the containertransported by shuttle 52. As seen in FIG. 2, the sensors 112, 114 arepositioned at an offset distance in the direction of shuttle travel(indicated by arrow M in FIG. 2) so that the light beam B is spaced adesired distance d from the location L1 of the front face of thecontainer T when brought to the docked position by the shuttle. As maybe realized, the front face of the container T advanced by the shuttle,breaks the beam B when at distance d from the docked position locationL1. The controller 400 is programmed with distance d. The controller 400is also programmed with an algorithm (program module 401 in FIG. 1) thatuses shuttle movement information, such as may be provided to thecontroller by motor encoder 53E (see also FIG. 7D), and the distance dto determine when shuttle advance movement is to be stopped so that thefront face of the container T on the shuttle is at location L1. Hence,when the front face of the advancing container T breaks beam B, thesensor 114 sends a suitable signal to the controller 400 informing thecontroller of the detection of the container front face. The controller400 then may determine when to command the shuttle advance to stop asnoted above, and sends the command to the shuttle drive section 54 atthe correct time. In this manner, each container T transported by theshuttle is appropriately positioned in its docked location to have thecontainer front face at location L1 regardless of the dimensionalvariation between containers.

With the container T in the docked position, as shown in FIG. 1, thedoor T4 of the container may be engaged by the door 30D of the load portmodule access port 300. The door T4 in the front face of the container Tis schematically illustrated in FIG. 9A. The door T4 may include latchsystems T40, T42 that when engaged retain the door T4 in the containerbox. Examples of the latch systems for the container door are disclosedin U.S. Pat. No. 5,772,386, issued Jun. 30, 1998 and incorporated byreference herein in its entirety. The door latch systems T40, T42 mayinclude a pivotable hub T44, to which the latch tabs T46 may bearticulately linked. Rotation of the hub T44 causes actuation of thelatch tabs T46 to engage and disengage the container housing. The latchhub T44 is accessible through latch key access holes T50 in the door T4.The container door T4 may also have locator pin holes T52 as shown inFIG. 9A. Referring again to FIG. 2, the access port door 30D of the loadport module has locator pins 120 and latch keys 122 in a complementaryor matching configuration to the locator pin holes T52 and latch keyaccess holes T50 in the door T4 of the container. The locator pins 120and latch keys 122 in port door 30D may be similar to locator pins andlatch keys in U.S. Pat. No. 5,772,386 (previously incorporated byreferenced herein). The latch keys 122 of the port door 30D conform tothe shape of the key access holes T50 in the container door and key holein the hub T44 of the latching system. When the port door 30D engagesthe container door T4, the latch keys 122 on the access door 30D enterthrough key access holes T50 into the key holes formed in the latch huesT44 of the container. Rotation of the latch keys 122 causes rotation ofthe hubs T44 and actuation of the latch systems to engage/disengage thelatch tabs thereby locking or unlocking the container door T4 from thecontainer.

As may be realized, latch keys 122 are rotatably mounted in the accessdoor structure. The latch keys 122 may include spindle shafts that arepivotally held in the access door. The far ends of the spindle shafts122S are shown in FIG. 4. FIG. 4 also shows the drive system 124 foroperating the latch keys. As seen from FIG. 4, the latch keys 122 areindependently driven. In this embodiment, the latch key drive system 124includes two servo motors 126A, 126B, one for actuating eachcorresponding latch key. Servo motor 126A is linked by a suitabletransmission 128A to the spindle shaft 122S of one latch key, and servomotor 126B is linked by a different transmission 128B to the spindleshaft of the other latch key. As seen in FIG. 4, both the servo motors126A, 126B and the corresponding transmissions 128A, 128B linking themotors to the respective key spindle shafts are independent. Thus eachkey 122 may be independently actuated. The servo motors 126A, 126B maybe communicably connected to the controller 400 to receive operatingcommands ordering motions of the servos, and to send suitable signals tothe controller identifying the motion accomplished by the servos inresponse to movement commands. If desired, the controller maysynchronize actuation of the latch keys 122 to move throughsubstantially the same range of motion at substantially the same time.Otherwise, the controller 400 may allow each key to rotate at itsoptimum speed and await signals from the servo motors that the commandedmotion is completed. In either case, the independent drive motors 126A,126B independently driving each of the latch keys 122 provide abouttwice the acuity to latching/unlatching problems (such as may be causedby misalignment between port door and container door, or betweencontainer door and container box, or damage to the container box)compared to conventional systems having a common drive for both latchkeys. Unlocking of the container door latch systems T40, T42 (byactivation of latch keys 122 of the port door as described above)releases the container door T4 from the container box. Upon release, thelatch keys 122 engaged into the container door serve to support thecontainer door T4 from the front door 30D.

FIGS. 6-6A respectively show another rear perspective view and sideelevation view of the load port module 24. As noted before, the portdoor 30D is movably mounted to the load port module frame 29. As will bedescribed in greater detail below, the port door 30D may be movedrelative to the frame 29 sufficiently to provide sufficient accessthrough access port 300 (see also FIG. 2) to facilitate substratetransport through the access port. In FIG. 6, the port door 30D is shownin, what shall be referred to for convenience, a closed or initialposition D1. In this embodiment, when placed in its initial position,the door 30D may contact the frame edges or rim of the access port 30Dto substantially seal the access port in its entirety. In alternateembodiments, the door in the closed position may not contact the frameor form a seal around the access port. In other alternate embodiments,the door in the closed position may only partially obstruct the accessport, and may be offset a distance from the frame edges around theaccess port. The load port module 24 has a door transport system 130capable of moving the port door 30D from the closed position D1 to anopen position D2 shown substantially in FIG. 6A. If desired, the portdoor 30D may be moved from its closed position after engagement to thecontainer door T4 and release of the container door from the containerbox. As described before, after release from the container box, thecontainer door T4 is supported by, and hence moves in unison with, theport door 30D. The door transport system 130 in this embodiment may bean electro-mechanical drive system, though in alternate embodiments anysuitable drive system, such as pneumatic or hydraulic, may be used. Thetransport system 130 is shown schematically in FIGS. 6-6A. Transportsystem 130 may generally include a frame 130F on which a suitable drivemotor (not shown), such as a stepper motor is mounted. The frame 130Falso movably supports a carriage 134 on which the port door 30D isfixedly mounted. A suitable linear drive transmission 132 drivinglyconnects the drive motor, in the frame, to the door carriage so thatoperation of the motor causes the carriage to move relative to frame130F along the transport system drive axis (indicated by arrow DA inFIG. 6A). Though movable along drive axis DA, the carriage is otherwisefixed relative to frame 130. The linear drive transmission 132 forexample may comprise a lead screw, driven by the output shaft of thedrive motor, and engaged to a nut on the door carriage 134. As seen inFIG. 6, the frame 130F of the transport system 130 is mounted by amovable mount 138 to the frame 29 of the load port module. The movablemount 138, which will be described in greater detail below, allows thetransport system frame 130F to pivot (about a pivot axis of mount 138)relative to the load port module frame (as indicated by arrow P in FIG.6A). When the frame 130F is pivoted, the transport system along with thecarriage 134 and door 30D are also pivoted about the pivot axis of mount188.

FIG. 6A shows best the position of the transport system 130 when theport door 30D is in the closed position D1. FIG. 6A also shows best therelative tilt between the port door 30D and the drive axis DA of thetransport system in this embodiment. The port door 30D fixed on carriage134 has an orientation that defines an angle α with the drive axis DA ofthe transport system 130. When the door 30D is in the closed position,the front face of the door may be substantially aligned with thevertical axis Z (i.e. the rear face of the access port) of the load portframe reference system. Alignment of the port door in the closedposition with the vertical axis Z ensures proper engagement with thecontainer door T4 when the container is in the docked position as notedbefore. In this position, as seen in FIG. 6A, the transport frame 130Fis inclined forwards so that the drive axis DA forms an angle α with theZ axis. To open the port door 30D, in this embodiment, the transportsystem frame may be rotated, in the direction indicated by arrow P, to aposition where the drive axis is vertical (in this position the driveaxis is identified as DA′), and the carriage 134 is then moved along thedrive axis DA′ to position D2. Closing the door is accomplished in asubstantially similar but reverse manner to opening. As seen in FIG. 6A,a suitable actuator 136, such as an electric solenoid or pneumaticpiston may be used to pivot the frame. As noted before, in thisembodiment door 30D has a fixed orientation relative to the doorcarriage 134, and the carriage 134, though translatable relative to thetransport frame 130F along axis DA′, maintain a fixed orientationrelative to the drive axis throughout the full range of motion of thecarriage on the transport system. Hence, the orientation of the door 30Dremains fixed relative to the transport drive axis DA′. Further,rotation of the transport frame 130F pivot 138 causes commensuraterotation of the door 30D about the pivot. For example, rotation of theframe 130F through angle α from the closed position (thereby positioningthe transport system drive axis to the vertical position indicated byarrow DA′ in FIG. 6A) will move the door 30D sufficiently so that thecontainer door T4 (see FIG. 9A), if supported on the port door 30D, ismoved through the access port 300 (see also FIG. 1) into the frontsection 12. The position of the port door 30D after pivot but beforetranslation is schematically depicted in FIG. 6A by line D2A. In thisposition, the port door 30D is angled relative to the vertical axis Z atangle α. In this embodiment, the port door 30D may be translated down bythe carriage 134 along the drive axis (indicated by arrow DA′) toposition D2 after the drive axis is moved to the vertical position.

Still referring to FIGS. 6-6A, in this embodiment the door transportsystem 130 is housed substantially inside the front extension section 38of the loadport module 24, both when the track 130F is in the inclinedposition (indicated by position I in FIG. 6A) and when the track isrotated to its vertical position. Portions of the carriage supports134S, to which port door 30D is mounted, may project beyond the plane ofthe access port 300 (as defined by base plate 292, see FIGS. 3-4) onlyas sufficient to allow connection between the door and carriagesupports. In the embodiment shown in FIGS. 6-6A, the connection betweendoor and carriage supports is such that the projection portions of thecarriage supports 134S, project from the plane of the access port aboutthe same distance as the thickness of the door. As may be realized fromFIGS. 6-6A, placement of the door transport systems 130 inside the frontextension section 38 of load port module (i.e. in front of the plane ofthe access port) commensurately eliminates the demand for space toaccommodate the transport systems with the front end module 12 as inconventional systems. Accordingly, the space envelope for the end module12 may be reduced compared to conventional system. Moreover, as theextension section 38 housing the door transport system, is locatedwithin the footprint of the transport container holding station 34, theoverall footprint of the load port module 24 in this embodiment isgenerally comparable to conventional load port modules. Hence, theoverall footprint of the front end module 12 and load port module 34 isless than conventional systems.

Movable mount 138 that mounts the door transport system 130 to the loadport frame 29 is shown in FIGS. 6-6A, and also in FIG. 11. The mount 138as noted before is configured to allow sufficient pivoting movement ofthe door transport system (in direction indicated by arrow P shown inFIG. 6A) so that the door 30D may be moved between its closed and openpositions. In this embodiment, the movable mount generally comprises abase section 138B and a resiliently flexible section 138F connected tothe base section. The transport system frame is attached and supportedfrom the resiliently flexible section 138F of the flexible mount 138,and the flexibility of the resiliently flexible section enables themovement of the transport system and door 30D relative to the load portmodule frame. In the embodiment shown in FIGS. 6-6A, the movable mount138 is representatively illustrated as having a general L shape orstructural angle configuration with the base section 138B at the bottomof the mount and the flexible section 138F extending generally upwardsfrom the base section. The mount 138 may be of unitary construction andmay be made of any suitable material such as metal, plastic orcomposite. The base section 138B illustrated in this embodiment as aflat frame may have any suitable shape with sufficient mountingsurfaces, such as flanges, for mounting the mount to the load portframe. The base section 138B is highly rigid relative to the flexiblesection 138F so that substantially all motion of the mount 138 formovement of the transport system, as described above, is derived fromresilient flexure of the flexible section. In this embodiment, theflexible section 138F has a general leaf or semi-leaf spring shapecantilevered from the base section. In alternate embodiments, theflexible section may comprise any suitable resiliently flexible elementssuch as torsion springs, or visco-elastic portions capable of generatingthe desired motion of the transport system to move the door 30D betweenclosed and open positions. In the embodiment shown in FIGS. 6-6A, and11, the flexible section 138F of movable mount 138 is depicted as beinga single leaf spring member for example purposes, and the flexiblesection may include any desired number of leaf spring members positionedalongside each other in a single plane, or arrayed serially in multiplesubstantially parallel planes, to deflect in unison and generate thedesired movement of the transport system. In this embodiment, theflexible section 138F is attached (by any suitable means such asmechanical fasteners, metallurgical or chemical adhesive bonding theleaf spring section to the transport system frame 130F proximate thebottom 130B (see FIG. 6) of the transport system frame. In alternateembodiments, the transport system movable mount may be located at anydesired location along the length of the transport system. As may berealized, the flexible section 138F is oriented so that the leaf springis in an undeflected configuration when the door is in its closedposition (D1 shown in FIG. 6A). Operation of actuator 136 to displacethe transport system 130 and open door 30D, causes the deflection of theresiliently flexible section 138F of the mount 133 (such as by resilientbending of the leaf spring in the direction indicated by arrow P)allowing the door to be rotated through angle α and reaches the openposition D2A. Operation of the actuator 136 to close the door 30D,causes the flexible section 138F to return to its undeflected position.The flexible section 138F is sized to sustain a substantially infinitenumber of door motion cycles. The movable mount 138, movably supportingthe port door 30D in the exemplary embodiment relies on flexibility tofacilitate motion, and hence, has no clearance gaps (as would beprovided on conventional movable mounts to enable relative slidingmovement between movable parts). This ensures that the motion of thedoor 30D between closed and open positions occurs substantially alongthe same path and hence the door returns to substantially the sameclosed position each and every time to a degree of accuracy simply notpossible using conventional movable mounts. This accuracy in theposition of the door 30D, eases its interface with the door T4 (see FIG.9A) on the transport container T as well as the fit up between thecontainer door and box upon closure of the container. The movable mount138 is also significantly easier to fabricate and install compared toconventional movable mounts employing sliding (rotational or linear)between mount elements.

The load port module 24 has a sensor 200 capable of detecting a presenceof substrates within container T when container door T4 is removed. Inthe embodiment shown in FIGS. 6-6A, the sensor 200 is mounted on thecarriage 134 of the transport system 130, as will be described below,and thus moves with the carriage 134. The sensors 200 may be of anysuitable kind, such as a thru-beam sensor, (e.g. an electro-magneticbeam source and detector), a CCD or capacitive influence sensor. In theembodiment shown in FIG. 6, the sensor 200 is depicted for examplepurposes only as a thru-beam sensor with two sensor heads 204, 206(respectively the beam source and detector). In this embodiment thesensor 200 is located above the door 30D. In this embodiment, the sensor200 is mounted on frame 202. As seen best in FIG. 6 extends generallyaround the door 30D to mount the sensor on the carriage 134. Frame 202,in this embodiment, has a general hoop configuration generallysurrounding, but not in contact with door 30D. Hoop frame 202 has agenerally transverse member 208, located above the door 30D, providingthe support surface for the sensor heads of sensor 200. The sensor frame202 also has a base portion 210, movably mounted to the door carriage134. The movable mounting between the frame 200 and carriage 134 allowsmovement of the frame, or at least a portion thereof, between a stowedor battery position wherein the sensor 200 is located within the EFEM asshown in FIG. 6A, and a deployed position wherein the sensor 200 ispositioned through the access port 30D into the transport container T aswill be described below. In the exemplary embodiment shown in FIGS.6-6A, a pivot joint or hinge 212 connects the frame 202 to the carriage134. The hinge 212 allows rotation of the frame in the directionindicated by arrow SR (see FIG. 6). In alternate embodiments, any othersuitable type of movable mount allowing any desired relative motion(i.e. linear or rotational) between sensor frame and carriage, forexample slides (e.g. linear or rotational) or resiliently flexiblemounts, may be used. In still other alternate embodiments, the sensorframe may be fixedly mounted to the carriage, and include intermediatemovable joints between carriage mounting and sensor platform allowingthe sensor platform to move relative to the carriage in order to deploythe sensor into the transport container.

As seen in FIG. 6, a drive 218 is operably connected to the frame inorder to effect movement of the frame about hinge 212 in the directionindicated by arrow SR. The sensor drive 218 may be of any suitable type,such as a servo motor or stepper motor or a pneumatic drive. Biasingmeans, such as springs (not shown) may be provided allowing automaticreturn of the sensor frame to the battery position in the event of powerloss to drive 218. In addition, positive stops 216 interacting withsnubbing surfaces (for example apertures 214 in the frame 202) to stopundesired movements of the frame, such as may arise from uncommandeddrive inputs from drive 218. Drive 218, as will be described furtherbelow, facilitates independent movement of the sensor 200 (in thedirection indicated by arrow SR in FIG. 6) relative to the port door30D. As noted before, the sensor 200 is shown in the battery position inFIGS. 6-6A. In this embodiment, the sensor frame 202 is configured sothat when the sensor is at battery, the frame 202 and sensors 204, 206do not protrude substantially inward into the EFEM beyond the innermostedge of the door 30D. Accordingly, the space envelope, from the frontface 12F (see FIG. 1) into the EFEM, to accommodate the sensor and frame202 is substantially the same as for the port door 30D. In alternateembodiments, the sensor frame may have any other desired profile.

FIGS. 11-12 illustrate a sensor 200A in accordance with anotherexemplary embodiment. The sensor 200A shown in FIGS. 11-12 issubstantially similar to sensor 200 described above and shown in FIGS.6-6A, and similar features are similarly numbered. Frame 202A, isgenerally similar to frame 202, providing a sensor support for sensorhead 204A above the door, though in alternate embodiments the sensorhead may be positioned at any desired location relative to the door oron the frame. Pivot mount 212A mounts the frame 202A to the carriage,and motor 218A operates on the frame to rotate the frame (in thedirection similar to direction SR in FIG. 6) and thereby move the sensorretention battery and deployed positions. The sensor battery anddeployed positions in the embodiment are substantially the same as thebattery and deployed positions of the sensor 200 in FIGS. 6-6A.Accordingly, FIGS. 11-12, along with FIGS. 6-6A will be used to describethe motion of the sensors, such as for example when mapping thesubstrates in the container T. As noted before, the sensor is shown inthe battery position when port door 30D is in the closed position (seeFIG. 6A). Rotation of the transport system frame 130F (as also describedbefore) opens the door (see position D2A in FIG. 6A) and moves the driveaxis DA to vertical. As may be realized, the sensor frame 202A,independently (with respect to door 30D) mounted to carriage 134 of thetransport system is also rotated inwards by rotation of the transportframe. The sensor 200 is still at battery relative to its range ofmotion. Prior to deployment of the sensor, carriage 134 may be moveddown along drive axis DA to a position placing sensor 200, 200A belowthe edge of the port opening 30D (see also FIG. 12). This allows, in theembodiment shown, unencumbered movement of the sensor from battery todeployed position. FIG. 12 best illustrates the sensor in the deployed200A′. Movement of the sensor 200, 200A to the deployed is accomplishedin this embodiment by independently rotating the frame 202, 202A in thedirection indicated by arrow SR in FIG. 6. As seen in FIG. 12, in thedeployed position the sensor head 204A protrudes through port opening300 into the container housing sufficiently to detect the presence ofsubstrates S inside the container T. Mapping of substrate locations inthe container may be performed by moving the carriage 134, 134A downalong drive axis DA′ (see FIG. 6A) when the sensor 200, 200A is in thedeployed position 200A′. As may be realized, mapping of the container Tmay be performed concurrent with the transport of the port door 30D fromposition D2A to position D2 (see FIG. 6A). Sensor signals may betransmitted via a suitable communication link (not shown) to controller400 (See FIG. 1).

As noted before, and with reference now again to FIG. 2, the load portmodule 24 is an intelligent load port module. Load port module 24includes an integral user interface 100, allowing a user to input data,programming instruction and commands and receive desired informationfrom the system. In this exemplary embodiment, the user interface 100includes a display 300. As seen in FIG. 2, display 300 is mounted to theload port frame 29. In this embodiment, display 300 is located to bevisible through opening 2912 in frame 29. Display opening 2912 in frame29 is located above the port opening 300 to allow a user an unobstructedview of the display when transport containers T are positioned at thesupport station 36. In alternate embodiments, the user interface display300 may be located in any other desired position on the load port.Display 300 in this embodiment is a graphical display (such as forexample a LCD with any desired definition) capable of displaying anydesired graphical information 302. This display structure is configuredto allow reading of display information when viewing the display fromany position in an arc or about 130° in front of the display. Thedisplay 300 may be color or monochrome, and may also include a touchscreen 304, which in combination with selectable features displayed ondisplay 300 allow a user to select desired commands and input desireddata and information. Other user interface devices such as keypads 306(see FIG. 1) or cursor tracking devices (e.g. mouse, joystick) may alsobe included in the load port module user interface 100 to operate inconjunction with or separate from the display 302. As seen in FIG. 2,the user interface 100 input devices (i.e. touch screen 304, keypad 306)and output devices (display 300) are connected by any suitablebi-directional communication links 500 to controller 400. Thecommunication link may be wired, between LPM 24 and controller 400 forexample, using FireWire™ communication protocol, or may be wireless forexample using Bluetooth™ communication protocol. The communication link500 may be incorporated into a network (for example a local areanetwork, or a global network such as the internet) or may be a dedicateddirect link between LPM user interface 100 and controller 400. In FIG.2, the communication link between controller 400 and LPM systems such asthe user interface 100, the shuttle drive 54, detection system 62, isillustrated as a representative communication link. The communicationlink however may be arranged as desired over any suitable number ofcommunication pathways. For example, the communication link betweencontroller 400 and user interface 100 may be disposed over one pathway,and the communication link interfacing the controller 400 with theshuttle drive 54 and/or detection system 62, and/or any other controlleroperated systems of the LPM described above may be disposed over adifferent communication pathway. It is noted, that the user interface100 mounted in a given LPM 24 may not be limited to serving as the userinterface for that LPM only. In the embodiment shown, the user interface100 in a given LPM frame may serve any desired number of LPMs. The LPMscapable of being served by the user interface 100 may be mated to thesame EFEM 12 (see FIG. 1), or may be mated to a number of differentEFEMs (not shown). In the embodiment shown in FIG. 1, controller 400 iscommunicably connected to the two LPMs 24 of the exemplary tool 10. Thecommunication link 500 between controller 400 and controllably operablesystems of each LPM (e.g. shuttle drive 54, container detection system62, container advance detection system 110, latch key drive system 124(see FIG. 4), door transport system 130 (see FIG. 6), mapper sensor 200,substrate transport apparatus 40, aligner 42 (see FIG. 5) etc. . . . )and between the controller 400 and user interface 100 of a given LPM 24,in effect defines a communication link between the user interface ofeach LPM and systems of either LPM. Controller 400 may be furthercoupled to other LPMs of other processing tools (not shown), andcommunication between the user interface 100 and systems on the otherLPMs may be effected in a similar manner. In the embodiment shown inFIGS. 1-2, each LPM 24 coupled to an EFEM 12 has an integral userinterface 100, though as noted before, in alternate embodiments one ormore of the LPMs may be without an integrated user interface, andsharing the integral user interface of another LPM. As seen in FIGS.1-2, communication link 500 further connects the controller, and hence,the user interface 100 to other components and systems of the tool 10such as the loadlock 14L and processing section 14 modules transportapparatus not shown) and atmosphere control system (not shown). Thus,the user interface 100 of the LPM 24 in this embodiment may be used toaccess information from, monitor and control any desired systems of agiven tool that are in communication with the controller. In alternateembodiments, the user interface integral to an LPM may be used tointerface with any desirable system of any tool that is in communicationwith the controller linked to the interface. As seen in FIG. 2, in thisembodiment communication link 500 may include some pathways or channels500A, 500B that bypass the controller 400 and directly link the userinterface 100 to one or more systems of the LPM 24 into which the userinterface is integrated, and/or one or more systems of the EFEM 12 towhich the LPM is mounted, and/or one or more systems of the tool 10. Forexample, communication pathway 500A may directly link user interface 100to the container shuttle drive 54 and detection system 62, and pathway500B may link the user interface directly to the container advancedetection system 110. Other pathways (not shown) similar to pathways500A, 500B may directly link the user interface to the other integralsystems of the LPM 24 (e.g. latch key drive 124, door transport 130,mapper 200, substrate transport apparatus 40, aligner 42 etc.). In thisembodiment, the user interface 100 may also include a local processor310, coupled to display 300, touch screen 304 (and if desired keypad306). The local processor 310 may have adequate processing capability(though if desired less than controller 400) to receive and process fordisplay, on display 300, raw signals from the various systems in directcommunication with the user interface 100, and also format and transmitsuitable commands (from user interface input) to the various systemsbypassing the controller 400. For example, the local processor 310 mayprovide, independent of controller 400, a “soft” key forstarting/stopping operation of a desired system, such as the containershuttle drive 54, or door transport 130. The local processor may displaythe “soft” key 308C on the display 300, and also may change thedisplayed states of the key upon selection by the user. For instance, ifthe soft key 308C is displayed initially as “START”, upon user selectionof the key the processor 306 may change the display to read “STOP” (andconversely change to “START” upon selection of “STOP”). The localprocessor 310 may also register the selection by the operator andgenerate therefrom a suitable command that is transmitted to the desiredsystem. The local processor may also change the displayed state (e.g.intermittent display “STOP”) upon receiving a signal from the systemthat the command cannot be performed due to the system encounteringoperational limits (e.g. travel stops for the shuttle transport) or asystem fault (e.g. damaged drive or motive system). As may be realized,the local processor 310 may be able to display any other desiredinformation. Interface between the local processor 310 and display 302,touch screen 304 as well as between local processor 310 and the systemsthe user interface 100 may directly communicate with, may beaccomplished in cooperation with the controller 400. The controller 400may have software interlocks (not shown) that enable the display and/orselection of various features and information capable of being broughtup by local processor 310 on the display 300/touch screen 304. Forexample, controller 400 may enable “soft” key 308C for display/selectionavailability by the local processor 310 when the LPM 24 or tool 10 isnot operating within a production cycle. The local processor 310, whichmay have limited processing capacity and memory compared to controller400, may download a desired command subroutine or algorithm from thecontroller 400 upon the operator selection of a given features in orderto carryout the selected feature. Similarly, the controller 400 mayinstruct any one of the systems with a direct communication path to theuser interface that upon existence of a desired condition, data/signalsare transmitted to the local controller 310 and bypassing the controller400. The local processor 310 thus provides local control and monitoringof load port and tool systems so that in circumstances when localcontrol is desired usage of the controller 400 is minimized or, ifdesired, eliminated. In alternate embodiments, the user interface 100may not be provided with a local processor, and substantially allprocessing capacity is provided by a controller similar to controller400.

As seen in FIG. 2, the communication link 500 may include a suitablecoupling or system connection interface 502 for connecting other devicesor networks 600 to the communication link 500 and allowingbi-directional communication between the devices/networks and anydesired components of the LPM 24 or tool 10. The coupling 502 isschematically illustrated in FIG. 2 and may be configured as desired tocomply with interface parameters of the devices/networks 600 to beconnected to communication link 500. For example, the coupling 502 mayinclude a contact interface such as a USB port, Firewire port, orEthernet port. The coupling 520 may also include a suitable wirelessinterface such as Bluetooth™. As may be realized, the coupling 502 mayinclude any desired number of independent couplings that may bepositioned as desired on communication link 500 (FIG. 2 shows a singlecoupling 502 for example purposes, and its depicted location is alsomerely exemplary). The devices 600 that may be communicably connectedvia coupling 502 may be for example a teaching pendent 602 or controllerused for programming the motion of transport systems such as thesubstrate transport apparatus 40 of the LPM. Other devices that may beconnected using coupling 502 may be PCs or peripheral devices such asprinter, modem etc. Networks 604 may be a local area network (LAN), awide area network such as the internet, or a public switched telephonenetwork. The controller 400 may be suitably arranged to provide a “plugand play” capability to the devices/networks 602, 604 coupled viacoupling 502. For example, controller 400 may include suitable softwarewithin a program module 401, 404 to select a mating to coupling 502 aswell as the communication protocol for communication with the coupleddevice/network. Upon detection of the coupling interface the controllermay initialize suitable communication software in the controller memory401, 404 to effect communication with the coupled devices/networks.

As may be realized, controller 400 has suitable driver software foroperating the display 300 and for interfacing with the user inputdevices (e.g. touch screen 304, keypad 306) of the user interface. Asseen in FIG. 1, the controller 400 has a program module 404 with theinterface software for the display 300 and input devices 304, 306 of theuser interface. Program module 404, shown in FIG. 1, is a representativeprogramming module of the controller, and may host any desired number ofdifferent programs and memory locations of the controller. Theinterfacing software may have any suitable architecture, such as a menuoperating architecture, for example a Windows™ type architecture, thoughany other suitable architecture may be used.

In the case of the menu operating architecture, the interfacing softwarein controller 400 may display selectable keys or menu features 308A onthe display 300 of the user interface 100. The software may allowselection of the displayed menu features 308A via the touch screen 304or keypad 306. As may be realized, the selectable menu features 308Amade available by the interface software correspond to executablesoftware resident in the memory modules 401, 404 of the controller 400,or local processor 310. For example, the executable software may be anoperation program for controlling operation of one or more of theindividual components and systems of the tool 10 and LPM 24 or of thetool 10 as an integrated unit. Accordingly, a selectable menu feature308A displayed on display 300 may be a command to controller 400 toinitiate and execute its program for operation of tool 10 to commenceprocessing of substrates therewith. In alternate embodiments where theoperating system architecture is other than a menu type architecture,the user interface may be employed in a substantially similar manner,except operating commands to the controller may be entered by any otherdesired means. By way of example, the user interface keypad may be usedto input one or more characters identifying operating commands to thecontroller, and the characters may be displayed on the user interfacedisplay screen when being entered.

As noted before, program modules 401, 404 of controller 400 may includeany desired number of programs that may be accessed and executed fromthe user interface 100 of the LPM 24. For example, the program modulesmay include any desired text or data programs or files, such asinstallation/operation manuals, calibration trouble shooting and serviceguides, that may be displayed on display 300 of the user interface. Thetext programs, may also include tables, illustrations, graphs, photos,and video portions, structured in any desired format for display on thedisplay 300 (for example illustrations and photos may be structured asbit maps). The text programs may be stored in the program modules 401,404 of controller 400 during system setup, or may be downloadedsubsequently from a suitable external or remote source, such as PC's onnetwork 604, (see FIG. 2) with which the controller may communicate overcommunication link coupling 502. Further, the communication suite ofcontroller 400 may allow an operator to view text and graphics fileslocated on remote sources (e.g. devices 602, 604) and not resident onthe controller. Similarly, the communication suite of the controller 400allows information displayed on the display of remote devices 602, 604to be displayed on the LPM display 300. For example, when the teachpendant 602 is connected to communication interface 502, such as forprogramming of the motion control of the substrate transport apparatus(see FIG. 3), information, displayed in connection with carrying out theprogramming with the teach pendant, that may be displayed on a displayof the teaching pendant 602, or a PC of network 604 linked to theteaching pendant 602, may also be displayed on the display 300 of theLPM user interface 100. Hence, an operator programming or “teaching” themotion of the transport apparatus of a tool similar to tool 10, may viewthe information associated with the “teaching” on display 300 of thevery same tool, where the operator is performing the teaching. Theprogram modules 401 may include various graphics programs, that incooperation with machine communication programs of the controller arecapable of reading and converting raw data or signals, from the systemsand components of the LPM 24 and tool 10 linked to controller 400, tographical information that may be displayed on display 300. Thisinformation may include status information and fault information of thecontrollable systems of tool 10. The display operating software mayallow a user to select the information desired to be displayed. Hence,the user interface and display 300 of the LPM will allow an operator toeffect tool setup, testing, trouble shooting and operation from thelocation or the LPM, without the use of further hardware.

Referring now to FIGS. 1 and 5, the LPM 24 may further include a digitalcamera 700 for monitoring one or more of the components in the EFEM oftool 10 as will be described further below. As seen in FIG. 1, thecamera 700, which may be internal to the LPM, is mounted to extendgenerally inside the EFEM. The camera is seen best in FIG. 5. As notedbefore, in this exemplary embodiment, multiple LPMs 24A-24L are joinedtogether to form the front face of the EFEM. In this embodiment, LPM 24Bis shown as having an internal camera 700. In alternate embodiments,more than one LPM, but not all LPM's, on an EFEM may have camerassimilar to LPM 24B shown in FIG. 5. The camera 700 may be mounted on therear face of the LPM frame 29 (see FIG. 3) so that mating of the LPM 24Bto the casing 16 of the EFEM positions the camera within the EFEM. Thecamera 700 may be integral to the LPM 24 or may be installed in the EFEMseparate from the LPM 24. The camera 700 may be mounted to the LPM 24Bby any suitable mounting means, such as mechanical fasteners. Theposition of the camera 700 relative to the LPM and system/components inthe embodiment shown in FIG. 5, is merely exemplary, and in alternateembodiments the camera may be mounted in any other suitable location onthe LPM frame. Further, camera 700 is schematically illustrated in FIGS.1 and 5 as a single camera head, and camera 700 may comprise more thanone camera head (not shown) distributed at different locations on theLPM frame. The camera or camera head unit 700, comprises a suitablecamera chip 702 and optics 704 for directing light to the camera chipfor generating a suitable image from the field of view FOV of thecamera. The camera chip 702 for example may be a CMOS type or a CCD typechip, or any other suitable type of camera chip. If desired, the cameramay include more than one camera chip. The camera chip(s) may have anydesired resolution, and may be capable of generating color or monochromeimages. The camera optics 704 may include for example, any suitablelenses, filters, mirrors, aperture (not shown) for guiding andcontrolling the amount of light directed to the camera chip(s) 702. Thecamera chip(s) 702 and optic(s) 704 are arranged so that the camera'sfield of view FOV and focal depth allows the camera to image a space(i.e. image coverage) that encompasses substantially the entire EFEMinterior. In alternate embodiments, the camera head may be gimbaled bysuitable servomotors to rotate the field of view to provide the desiredimage coverage for the camera. In other alternate embodiments, as notedbefore, multiple fixed camera heads may be employed to generate thedesired image coverage. In still other embodiments, the image coverageof the camera may be limited to cover desired regions or components ofthe EFEM such as the substrate transport apparatus, aligner, or LPMcharging opening. As may be realized, in the embodiment shown in FIGS. 1and 5, the image coverage of camera 700 is sufficient to includegenerally the full range of (θ, R) motion (indicated by arrows θ, R inFIG. 5) of the substrate transport apparatus 40 at substantially anylateral location (as indicated by arrow L) along the EFEM. The imagecoverage by camera 700 of apparatus 40 extends between the batteryposition (not shown) of the apparatus 40 and extended position (notshown) at the LPM charging open 300 (see FIG. 4), or at the load locks14L (FIG. 1). Hence, the image coverage of camera 700 allows the camerato image the transport apparatus 40 in substantially any operating θ, Rposition. In the exemplary embodiment shown in FIG. 5, the substratetransport apparatus has movement portion 40A movable in the directionsindicated by the θ, R arrows (as described before), and thus the imagecoverage of camera 700 corresponds to the plane, or otherwise field ofmotion encompassing the operating movements of the apparatus movementportion. In alternate embodiments, the movement portion of the transportapparatus may be operated through any other type and range of movement,and the camera or cameras in the EFEM may be provided with imagecoverage corresponding to the field/plane of motion of the movementportion of the transport apparatus.

As seen in FIG. 5, camera 700 includes suitable processing circuitry 706that in cooperation with the camera chip(s) 702 generates image datafrom the light directed upon the camera chip(s) and processes the datato a suitable format. The camera 700 may be connected to controller 400by communication link 500, described before, that allows bi-directionalcommunication between camera and controller. The program modules 401,404 of the controller may include software for operating the camera 700to capture images as desired. For example, the software in controller400 may be a higher level program capable of sending a generate imagecommand to the camera 700. The software in the controller, alsoinstructs the camera 700 as to which images are to be transmitted to thecontroller. The processing circuitry 706 of camera 700 may include aprogram module (not show), for example resident in suitable memory ofthe processing circuitry, that directly operates and effects the imagegeneration with the camera chip(s) 702 and processing circuitry 706 uponreceiving a generate image command from the controller 400. In thisembodiment, the processing circuitry 706 may also have suitable memoryfor buffering one or more electronic images, or data embodying theelectronic image(s), as desired prior to transmission of the image(s) tothe controller. The software in controller 400 is capable of receivingimages from the camera, and may use the images to predict, andtroubleshoot faults in the components imaged by the camera 700 such asthe substrate transport apparatus 40, as will be described in greaterdetail below. The controller software may also be capable of displayingthe images from the camera 700 on the display 300 (see also FIG. 2) ofthe LPM 24 described before.

Referring now to FIG. 13, there is shown a graphical representation ofan exemplary method for employing the camera 700 to assist monitoringand trouble shooting faults in the substrate transport apparatus 40 ontool 10. As may be realized, the exemplary method illustrated in FIG. 13and described below is generally applicable when camera 700 is used formonitoring and trouble shooting other components/systems within theimage coverage of the camera. As seen in FIG. 13, block P1, camera 700may be operated according to programming in controller 400 that embodiesthe method illustrated in FIG. 13, to generate base line image frames ofmovement portion 40A, of the substrate transport apparatus 40, as itundergoes its full or desired range or θ, R motion. The desired rangesof θ, R motion through which the movement portion 40A is exercised forgeneration of the base line image frames by camera 700 may substantiallyinclude expected θ, R motion during processing operation of the tool, aswell as desired test movements related specifically to assist troubleshooting faults in the apparatus 40. The base line image frames may begenerated after calibration of the movement portion 40A and also after“teaching” the controller 400 to move the movement portion 40 throughthe desired operational motion. In alternate embodiments, the base lineimage frames may be taken at any time. The timing and frequency of theimage frames during motion of the movement portion commanded by softwarein controller 400 and/or processing circuitry 706 of camera 700, may beset as desired. For example, the camera 700 may generate image frameswhen the movement portion 40A is transitioning desired portions of itsmovement path, and camera 700 may be in a standby mode in which it doesnot generate image frames when the movement portion is stopped ortransitioning portions of the movement data that are not of interest. Inalternate embodiments, the camera 700 may be commanded to generate imageframes at substantially all times the movement portion 40A is moving.The frequency of the image frames generated by camera 700 may be set asdesired, such as being sufficient to form a substantially continuousvideo stream. The base line image frames may be recorded in the memorylocations of controller 400. During operational movements of themovement portion 40A, for example in support of processing performed bythe tool, the camera 700 generates operational image frames of themovement portion, block P2 in FIG. 13. The timing and frequency of theoperational images frames may be similar to the timing and frequency ofcorresponding base line image frames (i.e. operational image frames andbase line image frames are generated for substantially the same movementpath of the movement portion 40A). In alternate embodiments, the timingand frequency of the operational image frames may be different (e.g.slower/less frequency) than the corresponding base line image frames. Inthis exemplary embodiment, the operational image frames may be bufferedin the camera 700, or other suitable buffer memory and transmitted tothe controller at predetermined times as described below. This reducesthe processing burden on the controller 400. The buffer is sized tostore a desired number of image frames. When the buffer is full, thebuffered image frames may be deleted. During operation of the movementportion 40A, the controller 400 is capable of detecting faults with themovement of the movement portion. Various sensors may be included in themovement portion 40A of the transport apparatus 40 in the EFEM to senseand signal the occurrence of faults in the movement of the movementportion to the controller. As seen in FIG. 13, block P3, if no faultsare detected by the controller 400 during operational movement of themovement portion 40A, some buffered operational image frames may beperiodically downloaded to the controller 400 (see block P4, FIG. 13).The periodically downloaded image frames may be selected image framesfrom the images frames existing in the buffer memory. The image framesselected for download may correspond to a desired condition that occursduring movement of the movement portion, for example the movementportion having a certain configuration, the drive of the movementportion delivering maximum torque, or the end effector of the movementportion undergoing maximum velocity or maximum acceleration. Theperiodicity of the downloads of selected image frames may be set asdesired, such as when other communication traffic with the connector isreduced, or once every movement cycle of movement portion 40A, or onceevery other movement cycle. After transmission to the controller inblock P4 of FIG. 13, the downloaded image frames may be compared to thebase line image frames to identify any positional deviation in themovement of the movement portion 40A. The comparison of image frames todetermine positional differences of the movement portion may beperformed by suitable algorithms, resident in controller 400, toidentify for example, the presence of trends developing in the deviationof movement of the movement portion 40A relative to baseline, and topredict when the deviation may exceed acceptable bounds. To facilitateuse of the baseline and operational image frames, each image framegenerated by the camera 700 may be provided with an identifier, such asa time tag though any other suitable identifier may be used, so thateach image frame may be related to a common reference frame. This allowseach image frame to be related to times of controller commands to themovement portion and actuation times of the movement portion.

As seen in FIG. 13, in the event the controller detects a fault duringoperational movement, block P3, the controller 400 downloads theoperational image frames in the buffer memory. The controller 400 maydownload selected buffered image frames, such as operational imageframes generated, and hence documenting movement portion position, in agiven period before and after the detection of the fault event, or maydownload all buffered image frames (see block P5). The image framesdownloaded in block P5 may be used to directly identify the location ofthe movement portion 40A at the time the fault was detected, and whenmovement of the movement portion has stopped. The location informationmay be used to assist in troubleshooting the fault, and in identifyingthe controller commands to the movement portion in order to move themovement portion from the stopped position. The downloaded operationalimage frames may also be compared to corresponding base line imageframes to identify positional deviations from base line of the movementportion. As noted before, the method illustrated in FIG. 13 is oneexample of a suitable method in which the camera 700 of the LPM 24 maybe employed. Camera 700 may be employed in other ways to improve theoperation of the EFEM of tool 10. If desired, the cameras 700 may becapable of being operated by user commands entered via the userinterface 100 to view the EFEM real time on display 300.

It should be understood that the foregoing description is onlyillustrative of the invention. Various alternatives and modificationscan be devised by those skilled in the art without departing from theinvention. Accordingly, the present invention is intended to embrace allsuch alternatives, modifications and variances which fall within thescope of the appended claims.

What is claimed is:
 1. A substrate loading device comprising: a frameadapted for connecting the device to a substrate processing apparatus,the frame having a transport opening through which substrates aretransported between the device and processing apparatus; and a substratetransport container support connected to the frame for holding at leastone substrate transport container, the substrate transport containersupport comprising a cover covering at least a portion of the substratetransport container support on which portion the at least one substratetransport container is seated, the cover having a resiliently flexiblesection, at least one detector for detecting a presence of the at leastone substrate transport container on the substrate transport containersupport, and a member connected to the resiliently flexible section ofthe cover to move as a unit with the resiliently flexible section,wherein the member cooperates with the at least one detector causing theat least one detector to detect the presence of the at least onesubstrate transport container on the substrate transport containersupport.
 2. The device according to claim 1, wherein the resilientlyflexible section is resiliently deflected when the at least onesubstrate transport container is supported by the substrate transportcontainer support.
 3. The device according to claim 1, wherein the atleast one detector is connected to the cover.
 4. The device according toclaim 1, wherein the at least one detector is an optical detector. 5.The device according to claim 1, wherein the at least one detector ismounted on a printed circuit board covered by the cover.
 6. The deviceaccording to claim 1, wherein the at least one detector comprises asensor residing on a printed circuit board.
 7. The device according toclaim 1, wherein the cover is a unitary member made of plastic.
 8. Thedevice according to claim 1, wherein the member is an interrupter memberfor an optical detector.
 9. The device according to claim 1, whereindeflection of the resiliently flexible section moves the member foreffecting detection of the at least one substrate transport container onthe substrate transport container support.
 10. The device according toclaim 1, wherein the cover has a pair of slots formed therein definingthe resiliently flexible section.
 11. The device according to claim 1,wherein the resiliently flexible section is an elongated cantilever. 12.The device according to claim 1, wherein the resiliently flexiblesection and member are integral to the cover and the cover is a unitarymember.
 13. The device according to claim 1, wherein the at least onedetector is arranged so that the at least one detector cooperates withat least one information pad of the at least one substrate transportcontainer so that the at least one detector detects both presence and atleast one predetermined characteristic of the at least one substratetransport container on the substrate transport container support.
 14. Asubstrate loading device comprising: a frame adapted for connecting thedevice to a substrate processing apparatus, the frame having a transportopening through which substrates are transported between the device andprocessing apparatus; and a substrate transport container supportconnected to the frame for holding at least one substrate transportcontainer, the substrate transport container support comprising a covercovering at least a portion of the substrate transport containersupport, on which portion the at least one substrate transport containeris seated, and at least one detector for detecting when the at least onesubstrate transport container is on the substrate transport containersupport, wherein the cover is of unitary construction and has aresiliently flexible tab, and wherein the at least one detectorcomprises a member mounted to the resiliently flexible tab for effectingdetection, with the detector, of the at least one substrate transportcontainer on the substrate transport container support.
 15. The deviceaccording to claim 14, further comprising at least another detectorconnected to the cover for detecting when the at least one substratetransport container is in the substrate transport container support,wherein the cover has another resiliently flexible tab and the at leastanother detector has another member mounted to the other resilientlyflexible tab.
 16. The device according to claim 14, wherein theresiliently flexible tab is resiliently deflected when the substratetransport container is supported by the substrate transport containersupport.
 17. The device according to claim 14, wherein the at least onedetector is an optical detector.
 18. The device according to claim 14,wherein the at least one detector is arranged so that the at least onedetector cooperates with at least one information pad of the at leastone substrate transport container so that the at least one detectordetects both presence and at least one predetermined characteristic ofthe at least one substrate transport container on the substratetransport container support.
 19. A substrate loading device comprising:a frame adapted for connecting the device to a substrate processingapparatus, the frame having a transport opening through which substratesare transported between the device and processing apparatus; and asubstrate transport container support connected to the frame for holdingat least one substrate transport container, the substrate transportcontainer support comprising a cover covering at least a portion of thesubstrate transport container support on which portion the at least onesubstrate transport container is seated, the cover having a resilientlyflexible section, and at least one detector configured for detecting apresence of the at least one substrate transport container on thesubstrate transport container support, wherein the resiliently flexiblesection cooperates with the at least one detector causing the at leastone detector to detect the presence of the substrate transport containeron the substrate transport container support.
 20. The device accordingto claim 19, wherein the resiliently flexible section is integral to thecover and the cover is a unitary member.
 21. The device according toclaim 19, further comprising a member connected to the resilientlyflexible section of the cover to move as a unit with the resilientlyflexible section.
 22. The device according to claim 21, wherein theresiliently flexible section and member are integral to the cover andthe cover is a unitary member.
 23. The device according to claim 19,wherein the at least one detector is arranged so that the at least onedetector cooperates with at least one information pad of the substratetransport container so that the at least one detector detects bothpresence and at least one predetermined characteristic of the substratetransport container on the substrate transport container support.